2020
DOI: 10.1016/j.sna.2020.111839
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Harmonic excitation response performance and active regulation of the high-frequency piezoelectric ultrasonic transducer used in the thermosonic bonding for microelectronics

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Cited by 16 publications
(3 citation statements)
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References 27 publications
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“…This strategy based on the characteristics of the admittance circle of PT effectively avoids the influence of the system variation and brings better accuracy and faster tracking speed than traditional PLL-based methods, especially under low power consumption conditions. Furthermore, H. Zhang et al [177] proposed an artificial neural network method to characterize the response performance based on the radial basis function, which extracts the peak overshoot percentage and settling time from the harmonic excitation response signal of the transducer. This method can predict the new resonance frequency and provide support for the control system.…”
Section: Key Control Technologiesmentioning
confidence: 99%
“…This strategy based on the characteristics of the admittance circle of PT effectively avoids the influence of the system variation and brings better accuracy and faster tracking speed than traditional PLL-based methods, especially under low power consumption conditions. Furthermore, H. Zhang et al [177] proposed an artificial neural network method to characterize the response performance based on the radial basis function, which extracts the peak overshoot percentage and settling time from the harmonic excitation response signal of the transducer. This method can predict the new resonance frequency and provide support for the control system.…”
Section: Key Control Technologiesmentioning
confidence: 99%
“…In the late 1980s, Lin Z M, an ultrasonic research expert from Shaanxi Normal University, compiled the principle and the design of the ultrasonic horn, which laid the teaching foundation in the domestic ultrasonic field [5]. In 2020, Zhang H J of Tiangong University optimized the resonance performance of the energy converter at different temperatures [6], and Hu G H of Henan University of Science and Technology designed a longitudinal bending composite two-dimensional ultrasonic transducer using finite element analysis [7]. In 2021, Hu T et al of Sichuan University studied a design method of a full wavelength piezoelectric ultrasonic transducer based on the mechanical quality factor given the problems of many size parameters and complex calculation caused by the conventional design method of transducer [8], and Xu L of China Jiliang University proposed a design method for radial vibration of stepped ring piezoelectric transducer [9].…”
Section: Introductionmentioning
confidence: 99%
“…Many real-life applications, such as transducers, pressure sensors, actuators [1], ultrasonic [2][3][4], medical [5,6], and automobile structures [7,8], use piezoelectric materials due to their distinct characteristics and unique electrical, mechanical, chemical, and thermal properties. The piezoelectric materials possess two important phenomena: direct piezoelectric effect, in which the mechanical energy is converted to electrical energy, and converse piezoelectric effect, where the electrical energy is converted to mechanical energy [9].…”
Section: Introductionmentioning
confidence: 99%