Hardware Platforms for MEMS Gyroscope Tuning Based on Evolutionary Computation Using Open-Loop and Closed-Loop Frequency Response

Abstract

Abstract. We propose a tuning method for MEMS gyroscopes based on evolutionary computation to efficiently increase the sensitivity of MEMS gyroscopes through tuning. The tuning method was tested for the second generation JPL/Boeing Post-resonator MEMS gyroscope using the measurement of the frequency response of the MEMS device in open-loop operation We also report on the development of a hardware platform for integrated tuning and closedloop operation of MEMS gyroscopes. The control of this device is implemented through a digital design on a Field Programmable Gate Array (FPGA). The hardware platform easily transitions to an embedded solution that allows for the miniaturization of the system to a single chip.

Stochastic optimization framework (SOF) for computer-optimized design, engineering, and performance of multi-dimensional systems and processes

“…The ultimate performance of the micro-gyroscope has a strong dependence on both of these factors above and it is therefore subject to an electro-static fine-tuning procedure, performed by hand, which is necessary due to unavoidable manufacturing inaccuracies. To fine-tune the micro-gyroscope, four voltages applied to eight electrodes (capacitor plates) have to be determined within a range of -60V to 15V, respectively [29][30][31][32][33]. The fine-tuning directly correlates with the accuracy of the micro-gyroscope in later use.…”

“…The process of manually fine-tuning the micro-gyroscope takes on the order of several hours. To fully automate this time-taking process, we have established a hardware/software interface (as part of the SOF) to the existing manual micro-gyroscope tuning hardware-setup, using commercial-off-the-shelf (COTS) components such as four programmable power supplies, one offset power supply, and an (electronic) signal analyzer, as well as driver and analyzing software [29][30][31][32][33]. We have developed a modified Simulated Annealing algorithm for efficiently determining optimized tuning voltages [29][30][31][32][33] and incorporated it in the hardware/software interface of the SOF.…”

“…To fully automate this time-taking process, we have established a hardware/software interface (as part of the SOF) to the existing manual micro-gyroscope tuning hardware-setup, using commercial-off-the-shelf (COTS) components such as four programmable power supplies, one offset power supply, and an (electronic) signal analyzer, as well as driver and analyzing software [29][30][31][32][33]. We have developed a modified Simulated Annealing algorithm for efficiently determining optimized tuning voltages [29][30][31][32][33] and incorporated it in the hardware/software interface of the SOF. We subsequently were able to successfully fine-tune, for the first time fully automatically, both MEMS post-resonating micro-gyroscopes and MEMS discresonating micro-gyroscopes within one hour to a level of accuracy that is equal to or better than what can be accomplished manually [29][30][31][32][33] (Fig.…”

A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

“…In this case the tunnelling accelerometer was modeled based on a clamped micro-circular plate with a tunneling tip and the classic Kirchhoff thin plate theory was used for deriving the governing equations. A new hardware platform for tuning a MEMS based gyroscope in open-loop by measuring the frequency response of the device was reported in [107]. These platforms tuned the gyroscopes based on an evolutionary computational technique that improved the sensitivity of the gyroscopes and also enabled closed-loop operation.…”

“…[127], [111] proposed active nonlinear and adaptive drive control approaches to compensate for errors due to device imperfections. Closed-loop tuning of a MEMS based gyroscope was reported in [107]. A custom-built integrated circuit that manages the signal filtering and provides real-time control for the JPL-Boeing manufactured MEMS based gyroscopes was reported in [128].…”