Optical Microlithography XVIII 2005
DOI: 10.1117/12.601033
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Hardness, elastic modulus, and fracture toughness bulk properties in Corning calcium fluoride

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Cited by 13 publications
(8 citation statements)
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“…13,20 The crystallographically conditioned anisotropy in hardness and material removal mechanisms of the CaF 2 single crystal leads to the anisotropy of stored energy and damage type. 7,9,11 In the regions of ductile deformation, damage is represented by dislocations and the dislocation density decreases toward the regions of brittle deformation, where cleavage microcracks prevail.…”
Section: Discussionmentioning
confidence: 99%
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“…13,20 The crystallographically conditioned anisotropy in hardness and material removal mechanisms of the CaF 2 single crystal leads to the anisotropy of stored energy and damage type. 7,9,11 In the regions of ductile deformation, damage is represented by dislocations and the dislocation density decreases toward the regions of brittle deformation, where cleavage microcracks prevail.…”
Section: Discussionmentioning
confidence: 99%
“…The anisotropy of the chemical-mechanical properties of a CaF 2 single crystal leads to different removal rates in certain parts of the processed surface and to the formation of a characteristic surface shape distortion with highs and lows varying periodically at 120 deg (Fig. 1), 6,7 which it is difficult to subsequently minimize without CNC subaperture correction polishing.…”
Section: Introductionmentioning
confidence: 99%
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“…Third, even if the thermal properties are relatively good for an Yb-doped material, some issues still have to be considered for high power applications. Since the fluorite is a soft material [50] (compared to oxides for example) the specificities of the laser crystal mounting and efficient interfacing with heat sinks are very critical in order to avoid excessive stresses. Indeed, it is demonstrated that stresses in fluorite induce birefringence effects [51] due to elastic anisotropy.…”
Section: B Drawbacksmentioning
confidence: 99%
“…In fact, its Knoop hardness and fracture toughness are ~163 kg mm −2 and ~0.3 MPa m 1/2 while those of glass (soda-lime) and silicon are ~500 kg mm −2 and 0.8 MPa m 1/2 , and ~1100 kg mm −2 and 0.9 MPa m 1/2 respectively. [28][29][30] Moreover, the thermal expansion of CaF 2 is about six times larger than that of silicon, whereas the thermal conductivity is more than ten times smaller, which means that it suffers larger thermal stresses.…”
Section: Introductionmentioning
confidence: 99%