Hardness and residual stress in nanocrystalline ZrN films: Effect of bias voltage and heat treatment

Tung, Hsiao-Ming; Huang, Jia-Hong; Tsai, Ding-Guey; Ai, Chi-Fong; Yu, Ge-Ping

doi:10.1016/j.msea.2008.09.006

Cited by 108 publications

(43 citation statements)

References 23 publications

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“…45,46 At too small grain sizes, the hardness can decrease as has been observed for CrN 47 and ZrN. 48 This has been explained by grain boundary sliding and an increased porosity due to the large amount of grain boundaries. 49,50 In this case, there is a large amount of amorphous or disordered material in the as-deposited film.…”

Section: Mechanical Propertiesmentioning

confidence: 88%

Phase transformations in nanocomposite ZrAlN thin films during annealing

et al. 2012

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Nanocomposite Zr 0.52 Al 0.48 N 1.11 thin films consisting of crystalline grains surrounded by an amorphous matrix were deposited using cathodic arc evaporation. The structure evolution after annealing of the films was studied using high-energy x-ray scattering and transmission electron microscopy. The mechanical properties were characterized by nanoindentation on as-deposited and annealed films. After annealing in temperatures of 1050-1400°C, nucleation and grain growth of cubic ZrN takes place in the film. This increases the hardness, which reaches a maximum, while parts of the film remain amorphous. Grain growth of the hexagonal AlN phase occurs above 1300°C.

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Section: Mechanical Propertiesmentioning

confidence: 88%

Phase transformations in nanocomposite ZrAlN thin films during annealing

et al. 2012

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“…Of which, the 22-specimen has the highest hardness of 339 HV with regard to the other groups. This phenomenon can be explained as follows: during the selective laser melting, the structure will be easily formed at a high solidification rate, as a result of increasing the material hardness, which is known as the established point-defect strengthening models [21,27]. In fact, the prior solidified layer was reheated and remelted by the subsequent laser energy input that can be severed as an anneal treatment.…”

Section: Microhardness and Residual Stressmentioning

confidence: 99%

Study on the microstructure, mechanical property and residual stress of SLM Inconel-718 alloy manufactured by differing island scanning strategy

Gan

et al. 2015

Optics & Laser Technology

436

172

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“…This pattern is suggestively caused by the incorporation of Zr atoms into the interstitial nitrogen sites. Alternatively, it may also have been caused by the incident of energetic particles which affected the surfaces during the film deposition …”

Section: Resultsmentioning

confidence: 99%

Effect of Zr content on friction and wear behavior of Cr‐Zr‐N coating system

Fellah

Aissani

Samad

et al. 2017

Int J Applied Ceramic Tech

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Nanostructured Cr‐Zr‐N thin film with different Zr content (0 to 48.8 at.%) was deposited, using an RF magnetron‐sputtering technique. The structural evolution and morphological changes were performed. The tribological performances were evaluated, using a ball‐on‐disk type Oscillating tribometer. The tests were carried out under normal loads of 2, 4 and 6 N, respectively, with an alumina ball (Al2O3) as a counter face. The results showed that the crystallite size of the Cr‐Zr‐N system was reduced to 10.8 nm at 31.8 at.% Zr content. Morphological studies of the films showed that the roughness continuously decreased with increasing Zr content, exhibiting a value of 11.2 nm at 31.8 at.% Zr. The wear rate tends to decrease with the increasing of Zr content to reach a lowest value of 1.95 × 10‐2 μm3.N.μm‐1 at 31.8 at.% Zr. The wear rate and friction coefficient were lower in the samples with 31.8 at.% Zr content. The improved friction and wear resistance were attributed to the grain refinement strengthening mechanism at 31.8 at.% of Zr.

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Hardness and residual stress in nanocrystalline ZrN films: Effect of bias voltage and heat treatment

Cited by 108 publications

References 23 publications

Phase transformations in nanocomposite ZrAlN thin films during annealing

Phase transformations in nanocomposite ZrAlN thin films during annealing

Study on the microstructure, mechanical property and residual stress of SLM Inconel-718 alloy manufactured by differing island scanning strategy

Effect of Zr content on friction and wear behavior of Cr‐Zr‐N coating system

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