1997
DOI: 10.1116/1.580933
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Hard boron–suboxide-based films deposited in a sputter-sourced, high-density plasma deposition system

Abstract: Boron–suboxide-based thin films have been deposited on Si in an electron cyclotron resonance microwave plasma using a radio frequency (rf) magnetron as a source of boron. Variations of the oxygen fraction in the deposition ambient and of the rf bias applied to the substrate were related to film tribology. The best films have hardnesses of ∼28 GPa and moduli of ∼240 GPa and were deposited in oxygen fractions <1% at substrate temperatures <350 °C. The films contain 4%–15% O and ∼15% C, with carbon … Show more

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Cited by 35 publications
(10 citation statements)
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“…31 The ≈ 0.3 GPa hardness of initial indents is very similar to values obtained for initial indentations into crystalline samples precipitated from solution. The maximum hardness was 2.0 ± 1.1 GPa and corresponds to a yield strength of about 0.7 GPa.…”
Section: B Films On Boron Oxide Substratessupporting
confidence: 76%
“…31 The ≈ 0.3 GPa hardness of initial indents is very similar to values obtained for initial indentations into crystalline samples precipitated from solution. The maximum hardness was 2.0 ± 1.1 GPa and corresponds to a yield strength of about 0.7 GPa.…”
Section: B Films On Boron Oxide Substratessupporting
confidence: 76%
“…8). These values are found to be smaller than those reported by Doughty et al for boron films prepared by plasmaassisted magnetron sputtering (28 and 240 GPa), 22 possibly because a much harder boron carbide phase is formed in their samples. Figure 8 shows that the hardness and elastic modulus of the films increase with N content first and reach maximum values of 18.8 and 222 GPa at a N content of 20.3 at.%.…”
Section: E Nanoindentationcontrasting
confidence: 54%
“…The oxidant such as ZnO would contaminate B 6 O in the process (3). Several researchers have reported the crystal structure 19-25, 30, 31) and some mechanical properties 26,30,32,36) of B 6 O. Since B 6 O is strong covalent nature and easy to decompose at high temperature more than 1973 K, 23) dense B 6 O bodies can be hardly obtained.…”
Section: Introductionmentioning
confidence: 99%