“…Under the establishment and development of microsystem technology, microsystems have been rapidly, effectively, and continuously used in science and technology industries. The microelectromechanical system (MEMS) process technology [1,2,3,4] and semiconductor process technology [5,6,7] are critical in the mass production of microsystem components. They are both integrated with multiple technologies, and generally arranged according to multiple sequential processes, including the cleaning and surface preparation of wafer preprocesses, photoresist coating and baking, alignment exposure, development, etching (or ion implantation), etc., as the final process of creating micrographic components or micro molds.…”