2016
DOI: 10.1063/1.4948454
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Hafnium dioxide as a dielectric for highly-sensitive waveguide-coupled surface plasmon resonance sensors

Abstract: Hafnium dioxide has been recognized as an excellent dielectric for microelectronics. However, its usefulness for the surface plasmon based sensors has not yet been tested. Here we investigate its usefulness for waveguide-coupled bi-metallic surface plasmon resonance sensors. Several Ag/HfO2/Au multilayer structure sensors were fabricated and evaluated by optical measurements and computer simulations. The resulting data establish correlations between the growth parameters and sensor performance. The sensor sens… Show more

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Cited by 14 publications
(4 citation statements)
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References 25 publications
(34 reference statements)
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“…The surface plasmon resonance (SPR) sensor, as an important optical sensor, has been used in chemical and biochemical sensing, gases sensing, medical diagnostics, and food safety detection for years [ 1 , 2 , 3 ]. The rapid development of SPR sensor technology is owed to its distinctive features, such as label-free quantification, real-time analysis, and high sensitivity [ 4 , 5 , 6 ].…”
Section: Introductionmentioning
confidence: 99%
“…The surface plasmon resonance (SPR) sensor, as an important optical sensor, has been used in chemical and biochemical sensing, gases sensing, medical diagnostics, and food safety detection for years [ 1 , 2 , 3 ]. The rapid development of SPR sensor technology is owed to its distinctive features, such as label-free quantification, real-time analysis, and high sensitivity [ 4 , 5 , 6 ].…”
Section: Introductionmentioning
confidence: 99%
“…Figure 2 shows the schematic of our system used for simultaneous measurements of the surface plasmon resonance and electrical resistivity of the samples. Compared to the traditional Kretschmann configuration optical system [17][18][19][20], this system utilizes a recently developed fixed-detector Kretschmann configuration optical system for the SPR measurements. One of the advantages of the fixed-detector system is that it does not require the use of a (θ, 2θ) goniometer [21].…”
Section: Methodsmentioning
confidence: 99%
“…Hafnium oxide is a transition metal oxide with a band gap energy of more than 5.0 eV and dielectric constant of more than 25 [1]. Because of its high mechanical and thermal stability, HfO 2 is widely used for protective coatings and waveguides [2,3]. Due to wide band gap and high refractive index, HfO 2 films have been employed in high reflectivity mirrors, anti-reflection coatings, filters and beam splitters [4][5][6][7].…”
Section: Introductionmentioning
confidence: 99%