Guidance characteristics of some displacement devices used in a high-precision He–Ne laser displacement measurement system

Abstract

The guidance characteristics of three different translation stages for application as the driver in a high precision displacement transducer calibration instrument (measuring laser) were assessed. A high voltage PZT tube, a low voltage three-segment PZT, and a corrugated diaphragm displacement device with a magnetic coil drive were investigated. The maximum yaw and pitch angles of the PZT tube were 8 and 5′′, respectively, for a translation of 3 μm. The maximum guiding deviation of the three-segment PZT for a displacement of 13 μm was 38′′ (yaw) and 17′′ (pitch) when applying the same voltage to all segments. The maximum guiding deviation, however, was able to be reduced to ±0.4′′ by applying different voltages to individual PZT segments. The guiding deviation of a corrugated diaphragm with a magnetic coil drive was ±0.6′′ (yaw) and ±0.4′′ (pitch) for a displacement of ±100 μm. The corrected three-segment PZT as well as the corrugated diaphragm device are suited for application with the measuring laser of this article.

A laser measurement system for the high-precision calibration of displacement transducers

“…The tilt angles in the horizontal and vertical directions during scanning of the PZT were measured automatically with a two-axis autocollimator (TA80 Rank Taylor Hobson) which was read out by a personal computer. In the horizontal direction a tilt of 8 and in the vertical direction one of 5 were measured [9]. This misalignment of the laser resonator led to a 35% lowering of the laser output power.…”

“…In a PC-guided experiment using three digital-analogue converters and the above-mentioned autocollimator the necessary corrections of the segment voltages to achieve tilt-free translation were investigated [9]. Scanning all three segments with the same operation voltage led to tilt angles of 38 in the horizontal direction and of 17 in the vertical direction [9]. Correction algorithms were computed to correct for the tilt angles of the device.…”