Growth Optimization of Multi-Layer Graphene for Thermal-TSV Application in 3D-LSI

Murugesan, M.; Koyanagi, Mitsumasa; Fukushima, Takafumi

doi:10.1109/3dic48104.2019.9058853

2019 International 3D Systems Integration Conference (3DIC) 2019

DOI: 10.1109/3dic48104.2019.9058853

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Growth Optimization of Multi-Layer Graphene for Thermal-TSV Application in 3D-LSI

M. Murugesan

Mitsumasa Koyanagi

Takafumi Fukushima

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Growth Optimization of Multi-Layer Graphene for Thermal-TSV Application in 3D-LSI

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References 20 publications

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