Growth optimization of columnar nanostructured diamond films with high electrical performances for SOD applications

Lions, Mathieu; Saada, S.; Pinault, M.‐A.; Andrieu, F.; Faynot, O.; Bergonzo, P.; Ferro, Gabriel; Siffert, P.

doi:10.1063/1.3518278

Cited by 5 publications

(2 citation statements)

References 12 publications

(13 reference statements)

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“…Это осаждение НКА пленок в различных газовых смесях: водород-метановой смеси [10], в водород-метановой смеси с добавлением кислорода [11], в водород-метановой смеси с добавлением инертного газа [12]. В ряде работ были получены нелегированные НКА пленки, обладающие хорошими изоляционными свойствами, высокой теплопроводностью и удельным сопротивлением, близким к удельному сопротивлению пленок диоксида кремния ∼ 10 14 Ом • см [13]. Такие нелегированные НКА пленки изучались в первую очередь с целью разработки электронных приборов по технологии кремний-наалмазе [14,15].…”

Section: Introductionunclassified

Исследование Нелегированных Нанокристаллических Алмазных Пленок, Выращенных Из Газовой Фазы В Плазме СВЧ Разряда

Вихарев¹,

Богданов²,

Овечкин³

et al. 2021

Физика И Техника Полупроводников

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Undoped nanocrystalline diamond (NCD) films less than 1 μm thick grown on Si (100) silicon by microwave plasma-assisted chemical vapor deposition at a frequency of 2.45 GHz are studied. To obtain diamond dielectric films with maximum resistivity the deposition of films in three gas mixtures is investigated: hydrogen-methane mixture, hydrogen-methane mixture with the addition of oxygen and hydrogen-methane mixture with the addition of an inert gas. A relationship has been established between the growth conditions, structural and electrical properties of NCD films. It is shown that for the use of NCD films as effective dielectrics preliminary high-temperature annealing of the films is required, for example, in vacuum at a temperature of 600°C for one hour.

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Section: Introductionunclassified

Исследование Нелегированных Нанокристаллических Алмазных Пленок, Выращенных Из Газовой Фазы В Плазме СВЧ Разряда

Вихарев¹,

Богданов²,

Овечкин³

et al. 2021

Физика И Техника Полупроводников

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“…The polycrystalline diamond is seen as a promising candidate for large scale integrated device applications of diamond since the synthesis of polycrystalline diamond thick film on the Si wafer have been established in the recent years. 19) We report the characterization of structural and electrical properties, and hightemperature operation of the present heterostructure.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of (Bi,Pr)(Fe,Mn)O₃ Thin Films on Polycrystalline Diamond Substrates by Chemical Solution Deposition and Their Properties

Kawae¹,

Kawasaki²,

Nakajima³

et al. 2012

Jpn. J. Appl. Phys.

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(Bi,Pr)(Fe,Mn)O3 (BPFM) thin films were deposited on the conductive B-doped diamond coated polycrystalline diamond substrates by chemical solution deposition method. BPFM thin films were crystallized with random orientation on the polycrystalline diamond. The BPFM/B-doped diamond layered film showed polarization vs electric field (P–E) hysteresis loops without any influences of leakage current at room temperature. The remnant polarization 2P r and the coercive field 2E c at the maximum electric field of 1000 kV/cm were 135 µC/cm2 and 700 kV/cm, respectively. In the range of room temperature to 130 °C, the prepared film capacitor showed saturated-loop shape in the P–E curve without influences of leakage current.

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Study of Undoped Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition

et al. 2021

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Growth optimization of columnar nanostructured diamond films with high electrical performances for SOD applications

Cited by 5 publications

References 12 publications

Исследование Нелегированных Нанокристаллических Алмазных Пленок, Выращенных Из Газовой Фазы В Плазме СВЧ Разряда

Исследование Нелегированных Нанокристаллических Алмазных Пленок, Выращенных Из Газовой Фазы В Плазме СВЧ Разряда

Fabrication of (Bi,Pr)(Fe,Mn)O₃ Thin Films on Polycrystalline Diamond Substrates by Chemical Solution Deposition and Their Properties

Study of Undoped Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition

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Growth optimization of columnar nanostructured diamond films with high electrical performances for SOD applications

Cited by 5 publications

References 12 publications

Исследование Нелегированных Нанокристаллических Алмазных Пленок, Выращенных Из Газовой Фазы В Плазме СВЧ Разряда

Исследование Нелегированных Нанокристаллических Алмазных Пленок, Выращенных Из Газовой Фазы В Плазме СВЧ Разряда

Fabrication of (Bi,Pr)(Fe,Mn)O3 Thin Films on Polycrystalline Diamond Substrates by Chemical Solution Deposition and Their Properties

Study of Undoped Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition

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Fabrication of (Bi,Pr)(Fe,Mn)O₃ Thin Films on Polycrystalline Diamond Substrates by Chemical Solution Deposition and Their Properties