1996
DOI: 10.1016/0022-0248(95)00949-3
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Growth of ultra-violet grade CaF2 crystals and their application for excimer laser optics

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Cited by 9 publications
(5 citation statements)
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“…For small n, the distance between steps is comparable to or even smaller than the step height and the resulting surfaces are atomically flat. However, they can be considered as stepped surfaces with an extremely high density of steps, and the step formation energy can be calculated using equation (2). In the following we shall use the notation type I and type II for the steps on (n + 2, n + 2, n) and (n + 2, n, n) surfaces, respectively.…”
Section: Steps On the (111) Surfacementioning
confidence: 99%
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“…For small n, the distance between steps is comparable to or even smaller than the step height and the resulting surfaces are atomically flat. However, they can be considered as stepped surfaces with an extremely high density of steps, and the step formation energy can be calculated using equation (2). In the following we shall use the notation type I and type II for the steps on (n + 2, n + 2, n) and (n + 2, n, n) surfaces, respectively.…”
Section: Steps On the (111) Surfacementioning
confidence: 99%
“…Absorbing defects in the band gap are most relevant in the ultraviolet (UV) spectral region since, due to the high energy of UV photons, defects may induce linear absorption even in wide-band-gap materials. Among these, CaF 2 is one of the most notable ones, since it is a stable, chemically rather inert material that can be grown as a single crystal of high quality and combines a wide band gap of close to 12 eV with convenient optical properties [2]. Advanced polishing techniques allow surface processing of CaF 2 to highest optical quality [3] and, therefore, this material is a promising candidate for use in high-performance optical lens systems [4] for the next generation of UV laser steppers operated a wavelength of 193 nm [5].…”
Section: Introductionmentioning
confidence: 99%
“…Fluorite-type crystals have been extensively investigated in the past [1][2][3][4][5][6][7][8] due to their broad technological relevance, including optical applications such as litho-excimer laser optics [9,10], beam deliveries, and zoom lenses, but also as a fluxing agent in the aluminum industry, as ceramic composites in fuel cell applications [11], and as an insulator within semiconductor multilayer structures [12]. Recently, CaF 2 nanoparticles have also attracted interest for medical applications, e.g., as markers in cancer therapy [13] and for potential use in dental care [14][15][16].…”
Section: Introductionmentioning
confidence: 99%
“…Taking into account that the relative error at estimating E l increases rapidly at wavelengths longer than 450 nm (see Ref. [74]), an optimum content of PbF 2 between 1.25 and 1.75 wt% can be cautiously inferred. Consequently, no matter how much PbF 2 is added (up to 2 wt.%) to the chemically purified fluorspar, the required purity of the starting material as regards oxygen contamination is not reached during its heating and melting, before the start of the melt crystallization despite the provision of HV conditions.…”
Section: Scavenger Efficiency Of Pbf 2 Without Htp Of Fluorsparmentioning
confidence: 99%
“…4) produced by a specially-designed [73,74] and optimized [68] technological scheme, called high-temperature purification (HTP), for the removal of the oxygen contaminants.…”
Section: Control Of Impurities In the Starting Materialsmentioning
confidence: 99%