“…But most of the previous computational results focused on the mechanism of sp 3 bond formation and the dependence of the atomic bond structure on the kinetic energy of the deposited species in pure carbon or hydrocarbon system. [7][8][9] In contrast, computational study on the metal element addition in DLC films is highly limited, especially for the direct simulation of the Me-DLC film growth by classical molecular dynamics (MD) simulation. Recently, we 10 reported the bond characteristics between all transition metal (TM) atoms and C atom by ab initio calculation using tetrahedral bond model, and revealed that as the 3d electrons of doped TM increased, the bond characteristic between the TM and C atoms changed from bonding (Sc, Ti) to nonbonding (V, Cr, Mn, Fe) and finally to antibonding (Co, Ni, Cu), which accounted for the change of total energy caused by distorting the bond angles.…”