Molecular Beam Epitaxy 2013
DOI: 10.1016/b978-0-12-387839-7.00003-8
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Growth of semiconductor nanowires by molecular beam epitaxy

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Cited by 3 publications
(3 citation statements)
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“…In this method, the thin film can grow epitaxially under the ultrahigh vacuum (for example, at 10 À8 Pa (Pascals)) and ultraslow deposition rate (<1000 nm/h) [145]. It is critical to control the MBE technique in order to grow epitaxial film, where their composition can be regulated to the monolayer level [147]. In a solid source MBE, ultrapure elements (gallium, Ga and arsenic, As) are heated in separate quasi-Knudsen effusion cells.…”
Section: Molecular Beam Epitaxymentioning
confidence: 99%
“…In this method, the thin film can grow epitaxially under the ultrahigh vacuum (for example, at 10 À8 Pa (Pascals)) and ultraslow deposition rate (<1000 nm/h) [145]. It is critical to control the MBE technique in order to grow epitaxial film, where their composition can be regulated to the monolayer level [147]. In a solid source MBE, ultrapure elements (gallium, Ga and arsenic, As) are heated in separate quasi-Knudsen effusion cells.…”
Section: Molecular Beam Epitaxymentioning
confidence: 99%
“…This results in a dramatic decrease of the size of the produced devices and significant simplification of the fabrication process. Silicon NWs can be produced via the VLS technique by chemical vapor deposition, , electron-beam evaporation, molecular beam epitaxy, magnetron sputtering, and pulsed laser deposition , (PLD). Among these technologies, PLD is the most flexible one in terms of plasma energy range (10–100 eV) and growth speeds.…”
Section: Introductionmentioning
confidence: 99%
“…The ultra-high vacuum and precise controlling allowed by MBE is beneficial in testing the growth model proposed. 113 In MBE system, the atoms for growing nanowires are directly provided by molecular beams, rather than decomposing metal-organic substances. Molecular beam epitaxy (MBE) is carried out in UHV chamber and the slow growth can guarantee the growth of high-quality materials.…”
Section: Mbementioning
confidence: 99%