Oxygen deficient YBaCuO thin films, c-epitaxially grown by 1aser ablation on different substrates such as (100)MgO, (100)SrTiO 3 and (100)LaΑIO 3 , were fluorinated by an ex situ solid/gas reaction with ΝF3 (3% ΝF3 diluted in Ν2) at 280°C. The kinetics of the reaction depends on the type of the substrate. After reaction the superconducting behaviour of the films is improved without degradation of their crystallinity, whatever the nature of the substrate. The stability of the fluorinated fllms under oxygen or nitrogen gas was studied. All these results will be compared with those previously obtained for fluorination of oxygen deficient YBaCuO ceramics.