Growth of large diameter silicon tube by EFG technique:

A multi-block method and multi-grid technique for large diameter EFG silicon tube growth

“…The detailed system configuration and mechanisms for the growth process have been discussed previously in Refs. [5,8]. The system is used to grow hollow silicon tubes of about 6 m tall with about 300 mm in thickness.…”

“…Extensive research has been performed to study this technique theoretically and experimentally [1][2]. As the computational power grows rapidly, numerical simulation becomes more and more important in contributing to the better understanding of the physical process and system design optimization [3][4][5][6][7][8][9].…”

“…The geometric, dynamic and computational complexities are the main challenges faced in the modeling of the EFG growth process [5]. The multi-time/length scale phenomena, due to the coupling of electromagnetism, thermal transport and capillary flow, demand a multi-resolution scheme in order to resolve various mechanisms at different scales.…”

“…However, the decoupling between the tube growth components and the entire growth system limits the capability of this kind of model in system level investigation. Global models, which study the coupling of electromagnetic and thermal fields in the entire inductively heated growth system, have been developed by several authors [5]. Due to the limitation of available computational resource, it is inadequate for the global model to resolve the physical mechanisms in EFG in all spectra if only a single block grid system is adopted.…”

The effect of the pressure on the static meniscus shape in the case of tube growth by edge-defined film-fed growth (E.F.G.) method

“…system. Recently, Roy et al [8,9] developed a generic numerical model for an inductively heated large diameter Si tube growth system. In Ref.…”