2002
DOI: 10.1021/jp0211640
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Growth of Iron Oxide on Yttria-Stabilized Zirconia by Atomic Layer Deposition

Abstract: The growth and thermal stability of an iron oxide overlayer on yttria-stabilized zirconia (YSZ) have been studied using atomic layer deposition (ALD), mainly in combination with low-energy ion scattering (LEIS). These techniques form a powerful combination, where ALD is designed for controlled (sub)monolayer deposition, while LEIS selectively probes the altered outermost atomic layer. The Fe(acac) 3 precursor reacts already at room temperature with YSZ. The reaction proceeds until saturation, which is characte… Show more

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Cited by 52 publications
(36 citation statements)
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“…The obtained diffusion coefficients (Table 9) are in a similar range as the one reported by Iltis et al [70]. The zirconia formed during oxidation exhibits much higher diffusion coefficients for iron than sintered yttria stabilized zirconia (single and polycrystalline material [72][73][74]), which are in the range of 10 À21 -10 À27 cm 2 /s when extrapolated to 415°C. The non-surprising difference in iron diffusion coefficient between the different types of yttria stabilized zirconia is the difference between single crystalline material [72] and sintered powder [73,74], for which surface diffusion in the porosity and grain boundary diffusion can be expected.…”
Section: Diffusion Coefficient Of Iron In Zirconia Towards the Surfacesupporting
confidence: 84%
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“…The obtained diffusion coefficients (Table 9) are in a similar range as the one reported by Iltis et al [70]. The zirconia formed during oxidation exhibits much higher diffusion coefficients for iron than sintered yttria stabilized zirconia (single and polycrystalline material [72][73][74]), which are in the range of 10 À21 -10 À27 cm 2 /s when extrapolated to 415°C. The non-surprising difference in iron diffusion coefficient between the different types of yttria stabilized zirconia is the difference between single crystalline material [72] and sintered powder [73,74], for which surface diffusion in the porosity and grain boundary diffusion can be expected.…”
Section: Diffusion Coefficient Of Iron In Zirconia Towards the Surfacesupporting
confidence: 84%
“…The zirconia formed during oxidation exhibits much higher diffusion coefficients for iron than sintered yttria stabilized zirconia (single and polycrystalline material [72][73][74]), which are in the range of 10 À21 -10 À27 cm 2 /s when extrapolated to 415°C. The non-surprising difference in iron diffusion coefficient between the different types of yttria stabilized zirconia is the difference between single crystalline material [72] and sintered powder [73,74], for which surface diffusion in the porosity and grain boundary diffusion can be expected. Due to the number of assumptions and the associated error, the diffusion coefficients calculated are a good estimate, confirmed by the comparison with Iltis et al [70], which can be also related to the very similar microstructure.…”
Section: Diffusion Coefficient Of Iron In Zirconia Towards the Surfacementioning
confidence: 99%
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“…Iron oxide ALD has been demonstrated on a wide array of crystalline surfaces using Fe(thd) 3 and Fe(acac) 3 as precursors [28,29]. Recently, Fe (C 5 H 5 ) 2 (ferrocene) and oxygen have been used to deposit iron oxide films onto Si(100) and anodic aluminum [30].…”
Section: Contents Lists Available At Sciencedirectmentioning
confidence: 99%
“…A variety of different methods has been used to deposit iron oxide thin films, e.g., sputtering, [4] sol-gel, [5] aqueous chemical growth, [3] molecular beam epitaxy (MBE), [8] CVD, [9,10] and ALD. [11][12][13][14] There are also numerous reports of nanostructured iron oxide. [3,[15][16][17][18] Despite all reports of nanostructured materials, it is inherently difficult to fabricate arrays in a well-ordered pattern.…”
Section: Introductionmentioning
confidence: 99%