Growth of Fe2O3 thin films by atomic layer deposition

A novel method to synthesis magnetic thin film of iron oxide

“…␣-Fe 2 O 3 thin films were grown using chemical vapor deposition technique with the source material of Fe(CO) 5 [11]. It was observed that ␣-Fe 2 O 3 phase was more stable in the low temperature range, while Fe 3 O 4 phase was observed above 120 • C. Lie et al [12] have utilized atomic layer deposition technique for deposition of Fe 2 O 3 thin films with Fe(thd) 3 (iron derivative of thd = 2,2,6,6-tetramethylheptane-3,5-dione) and ozone as precursors. Gich et al [13] netic multilayers thin films based on ZnO and Fe 3 O 4 using PLD [14].…”

Atomic Layer Deposition of Iron Oxide Thin Films and Nanotubes using Ferrocene and Oxygen as Precursors

“…A variety of different methods has been used to deposit iron oxide thin films, e.g., sputtering, [4] sol-gel, [5] aqueous chemical growth, [3] molecular beam epitaxy (MBE), [8] CVD, [9,10] and ALD. [11][12][13][14] There are also numerous reports of nanostructured iron oxide. [3,[15][16][17][18] Despite all reports of nanostructured materials, it is inherently difficult to fabricate arrays in a well-ordered pattern.…”

Electrochemical deposition of Fe2O3 in the presence of organic additives: a route to enhanced photoactivity

“…Additionally, oxygen evolution catalysts 22,23 and passivation layers 24,25 are employed to decrease the overpotential of the multistep 4e À oxygen evolution reaction which is inherently sluggish on hematite photoelectrodes. Hematite photoanodes can be prepared following several strategies such as sol-gel methods, 26 spray pyrolysis 27,28 chemical vapour deposition (CVD) 15,29 sputtering, 19 atomic layer deposition (ALD) 30,31 and electrodeposition (ED). [32][33][34] ED presents numerous attractive features over the other techniques such as the use of non-toxic iron precursors, simple instrumentation, high exibility in terms of composition and experimental parameters, and easy scale up for the fabrication of large area electrodes.…”