Growth of Diamond-Like Carbon and Icosahedral Boron Carbide by Chemical Vapor Deposition System

Abstract

Diamond-like carbon (DLC) possesses an array of valuable properties: outstanding abrasion and wear resistance; chemical inertness; exceptional hardness; low coefficient of friction; and high dielectric strength. Methods used to deposit DLC include ion beam deposition, cathodic arc spray, pulsed laser ablation, argon ion sputtering, and plasmaenhanced chemical vapor deposition. In the present work, carbon nano-structures were doped by boron atoms to synthesize icosahedral boron carbide using Hot Filament Chemical Vapor Deposition (HFCVD) system. Raman spectroscopy, X-ray diffraction technique, Debye-Scherrer calculation, Tuinstra-Koenig formula and scanning electron microscopy results were presented and discussed.