Abstract:We have studied photochemical deposition in a condensed phase. In the experiment, liquid silane ( SiH4) on a cryogenic substrate is irradiated with KrF and ArF excimer laser. The deposited film is characterized by Raman scattering, scanning electron microscopy, transmission electron microscopy and transmission electron diffraction. The film is composed of many rod-like crystalline silicon (c-Si) products. Their diameter and height are 400–500 nm and 500–700 nm, respectively. It is remarkable … Show more
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