2013
DOI: 10.1021/am4020007
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Growth of Crystalline Hydroxyapatite Thin Films at Room Temperature by Tuning the Energy of the RF-Magnetron Sputtering Plasma

Abstract: Right angle radio frequency magnetron sputtering technique (RAMS) was redesigned to favor the production of high-quality hydroxyapatite (HA) thin coatings for biomedical applications. Stoichiometric HA films with controlled crystallinity, thickness varying from 254 to 540 nm, crystallite mean size of 73 nm, and RMS roughness of 1.7 ± 0.9 nm, were obtained at room temperature by tuning the thermodynamic properties of the plasma sheath energy. The plasma energies were adjusted by using a suitable high magnetic f… Show more

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Cited by 68 publications
(82 citation statements)
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“…All peaks were indexed to a pure HAp according to the ICCD-PDF#00-009-0432 database. Some strongly preferred orientations for the (100) and (002) planes are usually found for HAp sputtered thin films [51]. For the thicker film of this work, the GIXRD pattern also shows higher relative intensities (I hkl /I 211 ) as compared to the ones found in the ICCD database.…”
Section: Preparation and Characterization Of The Hap Thin Filmssupporting
confidence: 62%
“…All peaks were indexed to a pure HAp according to the ICCD-PDF#00-009-0432 database. Some strongly preferred orientations for the (100) and (002) planes are usually found for HAp sputtered thin films [51]. For the thicker film of this work, the GIXRD pattern also shows higher relative intensities (I hkl /I 211 ) as compared to the ones found in the ICCD database.…”
Section: Preparation and Characterization Of The Hap Thin Filmssupporting
confidence: 62%
“…The RAMS system used in this work had the same setup as that described elsewhere [33,35]. It was composed of two magnetrons positioned face-to-face operating at 13.56 MHz.…”
Section: The Rams System and Plasma Characterisationmentioning
confidence: 99%
“…The floating potential of the substrate holder was used to improve thin-film crystallinity [33,35]. Plasma energies at different distances from the substrate position (Z = 29 mm) were evaluated by a Langmuir probe.…”
Section: The Rams System and Plasma Characterisationmentioning
confidence: 99%
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“…3 (b) reveals the formation of valleys on the surface of the deposited films. These valleys increase the average surface roughness of the coating to nearly 4.98 nm which is higher than the 2.6 nm roughness reported by Lopez et al [34]. It is already well established that human osteoblasts attach more readily to surfaces with a roughness less than 500 nm than to surfaces with a roughness greater than 2000 nm [35].…”
Section: Surface Morphologymentioning
confidence: 71%