1995
DOI: 10.1016/0022-0248(94)00534-6
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Growth of CaS thin films by solid source metalorganic chemical vapor deposition

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Cited by 12 publications
(8 citation statements)
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“…Whilst routes towards the deposition of Group 2 metal sulfides have been explored using dual source CVD including the calcium precursor (M(β‐diketonate) 2 (Figure a) and H 2 S or t BuSH, [Ca 3 (thd) 6 ] and H 2 S, and ALD ([Ca(thd) 2 (tetraen)] (Figure b) and H 2 S,[13a] or [{RC(N i Pr) 2 } 2 Ca} 2 ] (R = H or Me)[1b] (Figure c) and H 2 S. To the best of our knowledge, only one single source precursor for the production of CaS thins films has been reported to date. The non‐volatile crown‐ether derivative [(15‐crown‐5) · Ca(SOCMe) 2 ] (Figure d) has been employed as single source precursor for the AA‐CVD of CaS, which displayed preferential orientation (200) CaS, at 310 °C …”
Section: Introductionmentioning
confidence: 99%
“…Whilst routes towards the deposition of Group 2 metal sulfides have been explored using dual source CVD including the calcium precursor (M(β‐diketonate) 2 (Figure a) and H 2 S or t BuSH, [Ca 3 (thd) 6 ] and H 2 S, and ALD ([Ca(thd) 2 (tetraen)] (Figure b) and H 2 S,[13a] or [{RC(N i Pr) 2 } 2 Ca} 2 ] (R = H or Me)[1b] (Figure c) and H 2 S. To the best of our knowledge, only one single source precursor for the production of CaS thins films has been reported to date. The non‐volatile crown‐ether derivative [(15‐crown‐5) · Ca(SOCMe) 2 ] (Figure d) has been employed as single source precursor for the AA‐CVD of CaS, which displayed preferential orientation (200) CaS, at 310 °C …”
Section: Introductionmentioning
confidence: 99%
“…Meanwhile, Eu 2+ , Dy 3+ co-doped SrS is a red long-lasting phosphor, which can store to release the energy of absorbing light as photoluminescence [6,7]. Despite low dimensional nanostructures are of importance in nanodevices [8][9][10][11], only two-dimensional SrS films have been grown by different methods, such as metal-organic chemical vapor deposition [12], molecular-beam epitaxy (MBE) [13], atomic layer deposition [14], electron beam evaporation [15] and pulse laser deposition (PLD) [3] methods, evaporation/co-evaporation methods [16,17]. The one-dimensional nanostructure of SrS phosphors…”
Section: Introductionmentioning
confidence: 99%
“…It is difficult to produce alkaline-earth sulfide thin films with good crystallinity and proper stoichiometry. Several techniques such as metal-organic chemical vapor deposition [5], gassource molecular-beam epitaxy (MBE) [6], atomic layer deposition [7] sputtering [8], electron beam evaporation [9] and pulse laser deposition (PLD) [10] methods have been used to deposit alkaline-earth sulfide thin films under different growth conditions. In most of these growth techniques, the films are known to be sulfur deficient.…”
Section: Introductionmentioning
confidence: 99%