“…4b. 39,40,42,50,51,48,[52][53][54] All results indicated that the Al component decreased with pressure, which was attributed to the fact that the increased parasitic reaction of TMAl and NH 3 led to a large consumption of Al source due to rising pressure. Significantly, under the low pressure range (<150 torr), the Al component decreased rapidly with increasing pressure, which was especially prominent in the research of Touzi et al, 53 while the decline was slow under middle and high pressure range (>150 torr).…”