2006
DOI: 10.1007/s11664-006-0113-1
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Growth of AlGaN alloys exhibiting enhanced luminescence efficiency

Abstract: Interest in developing ultraviolet emitters using the III-Nitride family of semiconductors has sparked considerable effort in fabricating AlGaN alloys that exhibit enhanced luminescence based on strong carrier localization, similar to their InGaN brethren. In this paper, we report on the growth of such alloys by plasma-assisted molecular beam epitaxy (PA-MBE) without the use of indium. This enhancement is attributed to the presence of nanoscale compositional inhomogeneities (NCIs) in these materials. The emiss… Show more

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Cited by 30 publications
(15 citation statements)
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“…However, as these samples were all grown on c-plane sapphire with a similar buffer layer, they are all likely to have a similar large dislocation density. Furthermore, characterization of our NCI-AlGaN films by XRD shows no evidence of (0001) reflections [6], forbidden in a random wurtzite alloy but observed in ordered alloys, indicating that ordering is not responsible for the formation of the NCI regions in these films. Rather, these results indicate that nearly stoichiometric growth conditions promote the spontaneous formation of NCI regions in AlGaN alloys grown by PA-MBE.…”
Section: Growth Of Nci-algan Alloysmentioning
confidence: 85%
“…However, as these samples were all grown on c-plane sapphire with a similar buffer layer, they are all likely to have a similar large dislocation density. Furthermore, characterization of our NCI-AlGaN films by XRD shows no evidence of (0001) reflections [6], forbidden in a random wurtzite alloy but observed in ordered alloys, indicating that ordering is not responsible for the formation of the NCI regions in these films. Rather, these results indicate that nearly stoichiometric growth conditions promote the spontaneous formation of NCI regions in AlGaN alloys grown by PA-MBE.…”
Section: Growth Of Nci-algan Alloysmentioning
confidence: 85%
“…Such inhomogeneities in the Al x Ga 1Àx N layers with the middle-range Al content (0.25 < x < 0.5), grown by PA MBE, can originate from a considerable difference in surface mobility of Ga and Al adatoms in the middle growth-temperature range (700-750 C). [20][21][22] However, the reduction of the growth temperature below 700 C and maintaining the slightly metal-rich growth conditions, realized for the AlGaN growth in both A and B samples, should yield homogeneous alloys, as it occurred in the case of sample A. Thus, one can conclude that much stronger alloy inhomogeneity in sample B is generally induced by the 3D surface morphology inherited from the AlN buffer layer.…”
Section: The Quantum Confined Stark Effect and Exciton Localizationmentioning
confidence: 94%
“…The samples grown on bulk AlN substrates consisted of a 600 nm thick, 70% AlN mole fraction, NCI-AlGaN film deposited directly on the substrates by plasma assisted molecular beam epitaxy using conditions published elsewhere [6]. Prior to introduction into the reactor, the N-polar backsides of the substrates were sputter coated with a $2 lm thick Ti film to improve heating uniformity, which was then capped with a protective SiO layer to prevent damage to the film during chemical preparation.…”
Section: Experimental Methodsmentioning
confidence: 99%