Two-dimensional
(2D) transition metal dichalcogenides (TMDs) are
promising materials for numerous emergent applications. Here, we apply
atomic-resolution scanning transmission electron microscopy (TEM)
to resolve the intermediate stages during chemical vapor deposition
(CVD) synthesis of 2D rhenium diselenide (ReSe2). Contradictory
to the conventional growth models proposed previously, stable intermediate
species, viz., molecular metal chalcogenide clusters,
are experimentally unveiled. These molecular clusters present in the
chemical vapor deposition chamber can significantly alter the growth
kinetics, mass transport, and surface anchoring sites. The new layer
nucleation and the formed flake morphology are both substantially
influenced. Our work resolved the critical question of whether nucleation
occurs in atmosphere or on the solid surface. Besides, additional
experiments show that the hydrogen environment in the CVD chamber
can mitigate the aggregation problem of clusters, which is decisive
for obtaining uniform 2D full films. Combined with density functional
theory (DFT) calculations, the key reaction steps during growth are
identified. Here, we show a clear picture of the debated growth mechanisms
of 2D TMDs, expected to facilitate further optimization of CVD growth
conditions to achieve stable mass production.