Growth characteristics of silicon dioxide produced by rapid thermal oxidation processes

Chiou, Y.L.; Sow, Chorng Haur; Li, G.; Ports, K. A.

doi:10.1063/1.104265

Cited by 24 publications

(11 citation statements)

References 13 publications

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“…This process can take place at relatively high temperatures (900-1100°C) for well controlled short periods of time. Y. L. Chiouet al [12,27]obtained the ultra-thin silicon oxide films with good performance by rapid thermal oxidation, and they also analyzed the growth characteristics of silicon oxide.…”

Section: Thermal Oxidation Methodsmentioning

confidence: 99%

Preparation Methods and Application of Silicon Oxide Films

Wang¹,

Yang²,

Liang³

et al. 2014

Proceedings of the 2014 International Conference on Mechatronics, Electronic, Industrial and Control Engineering

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Silicon oxide is widely used as a thin film to improve the surface properties of materials, because it is of anti-resistance, hardness, corrosion resistance, dielectric, optical transparency etc. Just as these excellent performances, silicon oxide thin films are used in many fields. There are many ways to get silicon oxide films, such as evaporating deposition, sputtering deposition, ion plating, plasma enhanced chemical vapor deposition (PECVD), atmospheric pressure plasma deposition, sol-gel method and oxidation method etc. and the preparative techniques have obtained a certain research results so far. In this article, the principle and research status of different preparation technologies were summarized, and the application of silicon oxide films were discussed in aspects of packaging industry, microelectronics field, andoptical field. Besides, its application prospect is forecasted. Silicon oxide film swith more stable performance will gradually become industrialization and occupy the dominant position in surface modification for a long time.

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Section: Thermal Oxidation Methodsmentioning

confidence: 99%

Preparation Methods and Application of Silicon Oxide Films

Wang¹,

Yang²,

Liang³

et al. 2014

Proceedings of the 2014 International Conference on Mechatronics, Electronic, Industrial and Control Engineering

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“…This process of precipitation requires large amount of chromium and hence the chromium from the adjacent region diffuse resulting in the formation of chromium-depleted zone. This zone is anodic to the unaffected grains and consequently becomes a preferential site for corrosion attack or crack propagation under tensile stress.Presently various coating techniques such as oxidation of an evaporated metal film [5,6], reactive and non-reactive sputtering techniques [7], chemical vapor deposition [8], physical vapour deposition [9] and sol-gel coating [10] are employed to fabricate surface protective coatings for ferrous and non-ferrous alloys. Nevertheless, fabrication of nanocomposite coatings with required proportion of nanostructures like nanoparticles and nanorods of other elements by the above…”

mentioning

confidence: 99%

Corrosion Resistance of 304L SS Spray Coated with Zirconia Nanoparticles

Maheswari

Sivakumar

Indhumathi

et al. 2016

IOP Conf. Ser.: Mater. Sci. Eng.

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Grain boundary character modification employing thermo-mechanical processing in type 304L stainless steel S K Pradhan and S Mandal Abstr act. Influence of substrate temperature on corrosion (in 3.5% NaCl) and wear resistance of nanostructured zirconia thin film coated 304L SS substrates are studied by electrochemical and nano-indentation methods. This analysis shows 304L SS substrate spray coated with nanostructured zirconia at substrate temperature closer to the boiling point of the spray solvent ethanol exhibited good corrosion and wear resistance behaviour. This is because of the compressive stress developed during film fabrication at lower substrate temperature (~50 °C) and hence constrains the indentation plasticity, which leads to higher indentation load than the bare 304L SS. Key words: Zirconia nanoparticles, Spray coating, Corrosion resistance Intr oductionCorrosion is one of the most serious problems faced by industries. Metals normally corrode on exposure to environment and lose its useful properties. Consequently, metal components used in industries have to be repaired or replaced constantly. Though corrosion is inevitable, the rate of corrosion of metals can be reduced by proper choice of material combination [1], using corrosion inhibitors [2] or by surface modification [3] and protective coatings [4]. For instance, stainless steel is widely used for making oil field valves, chemical process equipment, aircraft fittings, fasteners, pump shafts, compressor impeller, nuclear reactor components, gears, paper mill equipment etc., because of its excellent mechanical and corrosion resistance properties. However, in chloride environments at elevated temperatures, austenitic stainless steels are prone to intergranular corrosion due to precipitation of chromium as chromium carbide (Cr 23 C 6 ) at grain boundaries. This process of precipitation requires large amount of chromium and hence the chromium from the adjacent region diffuse resulting in the formation of chromium-depleted zone. This zone is anodic to the unaffected grains and consequently becomes a preferential site for corrosion attack or crack propagation under tensile stress.Presently various coating techniques such as oxidation of an evaporated metal film [5,6], reactive and non-reactive sputtering techniques [7], chemical vapor deposition [8], physical vapour deposition [9] and sol-gel coating [10] are employed to fabricate surface protective coatings for ferrous and non-ferrous alloys. Nevertheless, fabrication of nanocomposite coatings with required proportion of nanostructures like nanoparticles and nanorods of other elements by the above

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“…As superfícies planares de SiO 2 foram obtidas por oxidação térmica rápida de lâminas de silício monocristalino [Chiou, et al, 1990] A tabela II.4.2 mostra a planilha de cálculo utilizada para calcular a quantidade de moléculas de fosfolipídio adsorvida por metro quadrado de sílica.…”

Section: -Obtenção Das Superfícies Planares De Si0unclassified

Interações entre vesículas sintéticas ou fosfolipídicas e superfícies de óxido de silício

Rapuano¹

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Ribeiro, pela orientação competente durante todo o decorrer do trabalho e por ter me iniciado na pesquisa cientifica. Ao Professor Dr. Miguel Jafelicci Júnior, da Universidade Estadual Paulista (UNESP)-campus de Araraquara-pela determinação da área superficial específica das partículas de sílica. À Sandra Micelli Sicchierolli, por ter me apresentado a linha de pesquisa do laboratório. A todos que passaram pelo grupo no decorrer do trabalho, Lílian Rumi

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Growth characteristics of silicon dioxide produced by rapid thermal oxidation processes

Cited by 24 publications

References 13 publications

Preparation Methods and Application of Silicon Oxide Films

Preparation Methods and Application of Silicon Oxide Films

Corrosion Resistance of 304L SS Spray Coated with Zirconia Nanoparticles

Interações entre vesículas sintéticas ou fosfolipídicas e superfícies de óxido de silício

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