“…However, this is not always the case, and particularly for transition metals that may adopt more than one oxidation state, alternative approaches are more often followed, in which activated oxygen is supplied during the growth. This can be accomplished by using an electron cyclotron resonance (ECR) oxygen plasma source, − gaseous NO 2 , , or ozone O 3 . , A commercial thermal cracker can be also used as a source of atomic oxygen. , Because the O 2 dissociation step is often rate limiting, the atomic oxygen assisted deposition may facilitate the reaction between individual metal and O atoms before metal cluster formation occurs. In this way, a higher degree of order and a better control on the stoichiometry and morphology of the oxide–metal interface can be achieved, as recently demonstrated for the monolayer of NiO on Ag(001) .…”