2004
DOI: 10.1016/j.tsf.2004.08.061
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Growth and characterization of thick cBN coatings on silicon and tool substrates

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Cited by 23 publications
(15 citation statements)
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“…Further description of the process and the experimental setup is published elsewhere [10,11,13]. For tool substrates, e.g.…”
Section: Coating Deposition Of the Cbn Layer Systemmentioning
confidence: 99%
See 1 more Smart Citation
“…Further description of the process and the experimental setup is published elsewhere [10,11,13]. For tool substrates, e.g.…”
Section: Coating Deposition Of the Cbn Layer Systemmentioning
confidence: 99%
“…The deposition of cBN films with thicknesses of more than 2 Am on silicon substrates and nearly 1 Am on cemented carbide cutting inserts at temperatures of < 600 -C was successfully performed in our laboratory [8 -10]. First results on application tests with such coatings were published recently [11].…”
Section: Introductionmentioning
confidence: 99%
“…of bilayers Young Modulus [GPa] No. of bilayers Many factors are attributable to improving hardness, Young modulus, and adhesion of the coating [5,6,8,9], among these is the deposition of a 300-nm thick TiN adhesion layer, which has a good compatibility to steel substrate and to the subsequent B 4 C film. Also important is the introduction of a compositional gradient of BCN, which allows a smooth and continuous transition of the mechanical properties from B 4 C to c-BN coatings.…”
Section: Resultsmentioning
confidence: 99%
“…Another factor is that densification of the coating system using nanometric multilayers avoids humidity diffusion to the substrate, which normally contributes to film delaminating. Additionally the inclusion of the TiN adhesion layer and of the softer BCNgradient/B 4 C multilayer lead to a reduction of the induced compressive stress in the film, so that the total residual stress of the coating decreases and its adhesion increases [5,[9][10][11]. Critical load [N] No.…”
Section: Resultsmentioning
confidence: 99%
“…Generally, cBN materials are fabricated by sintering with binder metals. cBN are also used to coat only a part of the 9 cutting edge of silicon or cemented carbide tool (Bewilogua et al, 2004). In sintered cBN materials containing binder metals, tool wear is caused mainly by the low strength of the binder metal (Luo et al, 1999).…”
Section: Introductionmentioning
confidence: 99%