2013
DOI: 10.4028/www.scientific.net/amr.816-817.106
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Growth and Characterization of the High Purity C-Mg Thin Films Obtained by Thermionic Vacuum Arc (TVA) Technology

Abstract: We investigated the growth and structure properties of C-Mg thin films obtained for the first time by Thermionic Vacuum Arc (TVA) deposition. The TVA technology is suitable for producing nanostructured materials because of the high power density of the vapor plasma generated by accelerated electron flux from the cathode and high energy of the ions incident on the depositing film, both these properties ensuring a high dispersion of the evaporated material. The properties of the deposited C-Mg thin films were in… Show more

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