Growth and characterization of C-N thin films

Mechanische und tribologische Eigenschaften von CNx-, SiCx- und SiNx-Schichten

“…Aktivita Èten zur Entwicklung von CN x -Schichten gehen auf theoretische Berechnungen [5] zuru Èck, wonach eine CN x -Verbindung mit der Struktur analog von b-Si 3 N 4 als ha Èrtestes Material u Èberhaupt existieren ko Ènnte. In einer Reihe von Arbeiten wurde daher dieses System bearbeitet, jedoch wurden nur selten kristalline Bereiche in den sonst amorphen Schichten identifiziert [6,7,8]. …”

Measurement and modeling of N‐atom behavior in the afterglow of a microwave plasma

“…Nitrogen afterglow can be used for steel surface nitriding (Ricard et al, 1990;Bougdira et al, 1991). Also nitrogen plasmas could be used to create carbon nitrides (Han and Feldman, 1988;Niu et al, 19931, very hard materials that have been shown to have excellent tribological properties (Chen et al, 1992). There is also interest in the use of nitrogen plasmas to create nanoparticles of structural ceramics, such as aluminum nitride (David et al, 1990) and silicon nitride (Anderson et al, 1989;Lee et al, 1990).…”

Tribological and mechanical properties of carbon nitride thin coating prepared by ion-beam-assisted deposition

“…However, there is still only a limited number of papers in which friction and wear of carbon nitride have been studied [3][4][5][6][7][8]. At present, little is known about the effect of CNx coating hardness and internal stress on its tribological properties, such as coating life and friction.…”