“…Researches about Micro-Electro-Mechanical Systems (MEMS) have developed rapidly over the past decade, enabling the development of computer communication devices, high-performance physical sensors, and especially inertial sensors. These sensors are characterized by their large memory capacity, small size and low cost, and it is due to these characteristics that they are widely used in various areas [ 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 ].…”