Abstract. Gross and partial ionization cross sections of CHion impact were found to be proportional to square of projectile charge q in accord with the first Born approximation. As the projectile charge was increased, the dependence became weaker than q 2 . From mass-spectroscopic measurements, the cross sections for CH 4 + and CH 3 + ion production were also found to obey the q 2 dependence in low charge ion impact. In high charge ion impact, their dependence, however, became weak compared with q 2 scaling. The fragmented ions, such as CH 2 + , CH + and C + , showed charge dependence steeper than CH 4 + and CH 3 + ions. Multiply charged carbon ions up to C 5+ were also observed.