Grinding characteristics of micro-abrasive pellet tools fabricated by a LIGA-like process

Luo, S.Y.; Yu, Tung-Hsi; Liu, C.Y.; Chen, M.H.

doi:10.1016/j.ijmachtools.2008.11.007

Cited by 17 publications

(2 citation statements)

References 14 publications

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“…Their research showed that arranging blade sequence further improved the grinding performance of the grinding wheel. Luo et al [8] designed a grinding wheel with ordered micro-abrasives; to make this grinding wheel, a lithography mask was used in composite electroforming, and they further studied the wear and grinding characteristics of the designed grinding wheel in grinding silicon wafer materials. Mao et al [9] used a laser to create micro spiral grooves on the working surface of a grinding wheel, filled the grooves with epoxy resin, and electroplated the grinding wheel with orderly arranged abrasive spirals.…”

Section: Introductionmentioning

confidence: 99%

Preparation and performance of grinding wheel with orderly arranged abrasive particles based on laser processing technology

Zhang²,

Zhang³

et al. 2023

Preprint

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Laser processing has its advantages of high energy density, good controllability and high flexibility; it has shown its importance in advancing modern manufacturing. Laser processing is used in this paper to fabricate an end grinding wheel with orderly arranged abrasive particles, and the performance of the fabricated grinding wheel is compared with that of a conventional grinding wheel. Our experiment and comparative studies have drawn the conclusions of (1) active laser brazing has been successfully used to arrange diamond particles in Archimedes’ spirals; (2) the resulted grinding wheel has shown the enhanced effectiveness in comparison with the conventional grinding wheel in terms of reduced grinding force; when the spiral change rate i is set 0.25, the tangential grinding force has been reduced by up to 60%; (3) for a grinding wheel with specific spiral change rate, ground debris are discharged from the grinding zone in a certain direction, and the grinding temperature can be reduced; (4) in high-speed grinding, the surface quality by the grinding wheel with orderly arranged abrasive particles is better than that of conventional grinding wheel; under the tested grinding conditions, the roughness of the ground surface has been reduced up to 47% of that by conventional grinding wheels; (5) the grinding wheel with orderly arranged abrasive particles has shown the better wear-resistance that conventional grinding wheels; abrasive particles of all four conventional grinding wheels are damaged to certain extent but orderly arranged abrasive particles on the fabricated wheel maintain mostly their protruded heights.

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Section: Introductionmentioning

confidence: 99%

Preparation and performance of grinding wheel with orderly arranged abrasive particles based on laser processing technology

Zhang²,

Zhang³

et al. 2023

Preprint

View full text Add to dashboard Cite

show abstract

“…Figure 8. Micro-abrasive pellets on the substrate for flat joint and partial resist, reproduced with permission 58. …”

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confidence: 99%

Review—Electroforming Process for Microsystems Fabrication

Rai,

Gupta

2023

J. Electrochem. Soc.

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Being an unconventional technique of additive micro-manufacturing, electroforming has garnered significant interest by various industrial sectors because of its capability to offer advanced micro-manufacturing competences with high precision in achieving dimensional uniformity and replication accuracy at small scale. This paper reports a comprehensive review of the electroforming process as a microsystem fabrication technique. This process is superior compared to 3D printing, stereolithography, selective laser sintering, and fused deposition modeling etc., in many aspects due to its unique properties. It can deposit a wide variety of metals and alloys, including precious metals, making it appropriate for variegated applications in microfabrication domain. We cover the fundamental aspects of electroforming and its history followed by the current state of the art advancement, modelling associated with it, and its importance from industrial context. Additionally, we discuss the advantages and limitations of this technique and their respective microsystems applications. Finally, we conclude with a discussion on the future prospects and potential advancements in the field of electroforming contributing to micro-systems development.

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Application of bionic phyllotaxis in internal cooling cup wheel: modeling-simulation and experimental verification

Peng

Luo

Бо

et al. 2021

Int J Adv Manuf Technol

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Grinding characteristics of micro-abrasive pellet tools fabricated by a LIGA-like process

Cited by 17 publications

References 14 publications

Preparation and performance of grinding wheel with orderly arranged abrasive particles based on laser processing technology

Preparation and performance of grinding wheel with orderly arranged abrasive particles based on laser processing technology

Review—Electroforming Process for Microsystems Fabrication

Application of bionic phyllotaxis in internal cooling cup wheel: modeling-simulation and experimental verification

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