Grid-shadow effect in grid-enhanced plasma source ion implantation

Abstract

-A grid-shadow effect is observed in grid-enhanced plasma source ion implantation, in which ions produced within the plasma region are extracted through a grid electrode and then accelerated to the inner surface of a cylindrical bore for implantation. By simulating the ion transportation behaviors from the grid electrode to the inner surface using a Monte Carlo model, we find that the grid-shadow effect results from grid blocking of the ion emission on the grid electrode, and it varies with the experimental parameters such as the gap distance between the grid electrode and the inner surface, the gas pressure, and the applied negative potential.

Влияние Формы Полого Катода На Параметры Плазмы Несамостоятельного Тлеющего Разряда С Внешней Инжекцией Электронов

“…Во втором способе генерации плазмы с помощью тлеющего разряда в полом катоде протяженной формы [5][6][7][8][9] при давлениях около 100 Па и выше предлагается использовать анод, установленный коаксиально вдоль всей полости протяженного катода.…”

Adhesion Improvement of Zirconium Coating on Polyurethane Modified by Plasmas

“…Gridded ion sources provide a high degree of independent control of ion energy and current, and the grid accelerated ions that are neutralized by special electron sources are mono-energetic, allowing the selection of specific ion energies for process optimization [1,2] . Alternatively, non-grid ion sources consist of fewer parts and have no maintenance requirements.…”