1998
DOI: 10.1063/1.121568
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Green photoluminescence from Er-containing amorphous SiN thin films

Abstract: Green light emission at room temperature was achieved from nonhydrogenated amorphous silicon–nitrogen (a-SiN) thin films. The films were deposited by cosputtering a silicon target covered with metallic erbium platelets in an Ar+N2 atmosphere. According to the deposition conditions, the nitrogen concentration [N] reached ∼40 at. % rendering an optical gap of approximately 3.5 eV while the Er concentration [Er] was estimated to be ∼10 at. % in the present films. The high [Er] associated to the optical band gap a… Show more

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Cited by 71 publications
(39 citation statements)
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“…15,16 We have reported, for the first time, ferromagnetism above room temperature ͑RT͒ in Mn/ Si 3 N 4 multilayered films. 17 The structural and electronic properties of few samples were studied by x-ray absorption spectroscopy ͑XAS͒ and x-ray magnetic circular dichroism, indicating the presence of a distorted noncentrosymmetric Mn 3 N 2 phase with slightly shorter Mn-N distances, which was proposed to be the origin of the ferromagnetism in this system.…”
Section: Introductionmentioning
confidence: 99%
“…15,16 We have reported, for the first time, ferromagnetism above room temperature ͑RT͒ in Mn/ Si 3 N 4 multilayered films. 17 The structural and electronic properties of few samples were studied by x-ray absorption spectroscopy ͑XAS͒ and x-ray magnetic circular dichroism, indicating the presence of a distorted noncentrosymmetric Mn 3 N 2 phase with slightly shorter Mn-N distances, which was proposed to be the origin of the ferromagnetism in this system.…”
Section: Introductionmentioning
confidence: 99%
“…In order to be comparable, the doped films were identical (composition, thickness, thermal treatment) to the Er-and ErYb-doped spacer layers present in the OMCs. Whereas 488.0 nm photons can effectively (and quasi-resonantly [5]) excite the Er 3+ ions in the a-SiN films (Fig. 3), this is not the case for the OMCs.…”
Section: Resultsmentioning
confidence: 95%
“…The scenario started to change in the 1980's with the introduction of some innovative concepts and methods giving rise to the (nowadays) well-established Si photonics [3]. One of these promising concepts is the doping of Si with rare-earth (RE) ions leading to either nearinfrared or visible light emission [4,5]. The successful emission from RE-doped Si materials is noteworthy not only due to the efficient extraction of light from Si-based materials, but because triply ionized RE ions provide spectrally sharp photon radiation that is almost insensitive to temperature effects.…”
Section: Introductionmentioning
confidence: 99%
“…Similar to III-N compounds such as GaN and AIN, Si 3 N 4 is also an excellent host material in terms of high dopant concentration, mechanical and thermal properties and chemical stabilities. It has been demonstrated that by introducing midgap levels into the wide band gap of 5.3 eV in nondoped Si 3 N 4 , the emission of green to ultraviolet light can be achieved [3][4][5][6]. The synthesis of Si 3 N 4 nanomaterials is of particular interest since they could be promising candidates for fabricating nanocomposites and electronic/optic nanodevices that can be operated at extreme conditions such as high temperatures, corrosive environments, high power and radiation environments.…”
Section: Introductionmentioning
confidence: 99%