The scanning electron microscope was used t o study the influence of plastic deformation on the cathode-luminescent emission from GaP epitaxial layers grown on pulled substrates. A cross-hatched pattern observed in the bent region was interpreted as the traces of the { 111) slip planes. The slip lines were observed to break up into lines of dots, the points of emergence of dislocations, where the deformation was less severe. The CL signal from the epi-layer decreased by >80% following bending, while that from the substrate increased, possibly as a result of gettering action.Le microscope Blectronique i L balayage est utilise d'etudier l'influence de la deformation plastique sur 1'6mission cathode-luminescence des GaP couches epitaxial croisse sur les substrats tires. Un dessin contre-hach6 observe Q la region courbee a interpret6 d' &re les traces des plans de glissement { 11 1). Les lignes de glissement ont observe Q diviser en les rangs des points noirs, les points d'emergence des dislocations, oh la deformation etait plus petite. Le signal cathode-luminescent de la couche Bpitaxial a diminue de >SOY0 suivant la deformation, en mbme temps que l'emission du substrat a s'accru, peut-&tre Q cause de l'action du getter.