Grating-patterned FeCo coated surface acoustic wave device for sensing magnetic field

Wang, Wen; Jia, Yana; Xue, Xufeng; Liang, Yong; Du, Zongliang

doi:10.1063/1.5012579

Cited by 17 publications

(15 citation statements)

References 14 publications

(15 reference statements)

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“…However, the achieved phase changes were comparably low at high magnetic bias fields, thus unsuitable for magnetic field sensing. In recent years, the interest in using SAW devices as magnetic field sensors has increased, with several groups investigating different designs and materials [396,[423][424][425][426][427]. It turned out that the highest magnetic sensitivities can be achieved by employing a guiding layer on substrates which generate shear horizontal waves, thereby exciting so-called Love waves [396,397,428,429].…”

Section: Lf Me Sensorsmentioning

confidence: 99%

Roadmap on Magnetoelectric Materials and Devices

et al. 2021

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The possibility to tune the magnetic properties of materials with voltage (converse magnetoelectricity) or to generate electric voltage with magnetic fields (direct magnetoelectricity) has opened new avenues in a large variety of technological fields, ranging from information technologies to healthcare devices and including a great number of multifunctional integrated systems such as mechanical antennas, magnetometers, radiofrequency (RF) tunable inductors, etc., which have been realized due to the strong strainmediated magnetoelectric (ME) coupling found in ME composites. The development of singlephase multiferroic materials (which exhibit simultaneous ferroelectric and ferromagnetic or antiferromagnetic orders), multiferroic heterostructures, as well as progress in other ME mechanisms, such as electrostatic surface charging or magneto-ionics (voltage-driven ion migration) have a large potential to boost energy efficiency in spintronics and magnetic actuators. This paper focuses on existing ME materials and devices and reviews the state of the art in their

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Section: Lf Me Sensorsmentioning

confidence: 99%

Roadmap on Magnetoelectric Materials and Devices

et al. 2021

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“…With 6944

, the sensitivity of the sensors described here is significantly higher using a delay-line length of

. Hanna [ 16 ] and Wang et al [ 28 ] describe the limit of detection (LOD) of their sensors to be 1

and 140

, respectively. As only the sensor dimension and the frequency is changed and the same layer thicknesses and material deposition processes were used, the sensor investigated here with

can be expected to have a similar LOD than the sensor described in a previous study with

at 10

[ 5 ].…”

Section: Experimental Datamentioning

confidence: 99%

Multi-Mode Love-Wave SAW Magnetic-Field Sensors

Schmalz

Kittmann

Durdaut

et al. 2020

Sensors

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A surface-acoustic-wave (SAW) magnetic-field sensor utilizing fundamental, first- and second-order Love-wave modes is investigated. A 4.5 μ m SiO2 guiding layer on an ST-cut quartz substrate is coated with a 200 n m (Fe90Co10)78Si12B10 magnetostrictive layer in a delay-line configuration. Love-waves are excited and detected by two interdigital transducers (IDT). The delta-E effect in the magnetostrictive layer causes a phase change with applied magnetic field. A sensitivity of 1250 ° / m T is measured for the fundamental Love mode at 263 M Hz . For the first-order Love mode a value of 45 ° / m T is obtained at 352 M Hz . This result is compared to finite-element-method (FEM) simulations using one-dimensional (1D) and two-and-a-half-dimensional (2.5 D) models. The FEM simulations confirm the large drop in sensitivity as the first-order mode is close to cut-off. For multi-mode operation, we identify as a suitable geometry a guiding layer to wavelength ratio of h GL / λ ≈ 1.5 for an IDT pitch of p = 12 μ m . For this layer configuration, the first three modes are sufficiently far away from cut-off and show good sensitivity.

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“…A SAW velocity change of 310 ppm is attained using a CoCr film [10]. Magnetostrictive FeCo films are deposited on SAW sensors for magnetic field and electric current measurements [11]. A SAW sensor based on a FeGa film obtains a relative velocity change of 0.64% [12].…”

Section: Introductionmentioning

confidence: 99%

Sensing Mechanism of Surface Acoustic Wave Magnetic Field Sensors Based on Ferromagnetic Films

Yang

Mishra

Han

et al. 2021

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Surface acoustic wave (SAW) sensors with ferromagnetic materials are used to measure magnetic fields or electric currents. The magnetic field sensitivities of SAW magnetic field sensors are essentially influenced by various factors. The sensing mechanism is complex due to the multiphysics coupling of the magnetic field, solid mechanics, and electric field. The magnetostriction effect, ΔE effect, and the third-order material constants are taken into consideration. The shape demagnetizing effect is reduced by increasing the lengthwidth ratio and length-height ratio of a ferromagnetic film on a SAW resonator. The model is verified by experiments and accurately predicts the magnetic field sensitivities of SAW resonant magnetic field sensors. The factors affecting the sensitivities are investigated from the perspective of the sensing mechanism. A grooved sensing surface structure is explored for an improved sensitivity. The results are beneficial to design reliable SAW magnetic field sensors with an enhanced sensitivity.

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Grating-patterned FeCo coated surface acoustic wave device for sensing magnetic field

Cited by 17 publications

References 14 publications

Roadmap on Magnetoelectric Materials and Devices

Roadmap on Magnetoelectric Materials and Devices

Multi-Mode Love-Wave SAW Magnetic-Field Sensors

Sensing Mechanism of Surface Acoustic Wave Magnetic Field Sensors Based on Ferromagnetic Films

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