Graphene Squeeze-Film Pressure Sensors

Dolleman, Robin J.; Davidovikj, Dejan; Cartamil-Bueno, Santiago J.; Zant, Herre S. J. van der; Steeneken, Peter G.

doi:10.1021/acs.nanolett.5b04251

Cited by 169 publications

(197 citation statements)

References 19 publications

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“…Two wires from the chip (EXC A (red) and Cin+ (blue)) are connected directly to the top and bottom electrode of our device respectively. Our entire chip (marked with (2) in the image) is mounted on a chip carrier inside the pressure chamber. The AD chip is interfaced using an Arduino Uno, which has a built-in I 2 C protocol library.…”

Section: Readout Using An Ad7746 Chip Interfaced With An Arduinomentioning

confidence: 99%

Static Capacitive Pressure Sensing Using a Single Graphene Drum

Davidovikj

Scheepers

Zant

et al. 2017

ACS Appl. Mater. Interfaces

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To realize nanomechanical graphene-based pressure and gas sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electro-mechanical systems (MEMS), gets increasingly challenging as one starts shrinking the dimensions of these devices, since the expected responsivity of such devices is below 0.1 aF/Pa. To overcome the challenges of detecting small capacitance changes, we design an electrical readout device fabricated on top of an insulating quartz substrate, maximizing the contribution of the suspended membrane to the total capacitance of the device. The capacitance of the drum is further increased by reducing the gap size to 110 nm. Using external pressure load, we demonstrate successful detection of capacitance changes of a single graphene drum down to 50 aF, and pressure differences down to 25 mbar.Nanomechanical devices from suspended graphene and other two-dimensional materials have been receiving growing interest in the past few years for their potential as sensitive pressure 1-5 and gas 6-8 sensors. To realize integrated, small and low-power devices, it is necessary to have all-electrical on-chip transduction schemes, in contrast to the currently often employed laser interferometry techniques for the readout of their dynamic motion and static deflection.Reports on electrical readout of graphene membrane nanomechanical devices have employed readout schemes based on electrical transconductance 5,9 and piezoresistivity 1,3 . Both of these rely on the change in the conductance of the membrane as a function of deflection, which is then used to sense the motion of the membrane. Although these methods can be very sensitive, the graphene conductance can also be affected by variations in gas composition, humidity, light intensity and temperature. Moreover, the conductance is not only related to the deflection of the graphene membrane, but depends also on material parameters like the electron mobility and piezoresistive coefficients. These approaches therefore require calibration and a high degree of stability of the graphene and insensitivity to variations in its surroundings.In contrast, the capacitance between a graphene membrane and a bottom electrode is, to first order, a function only of the geometry of the system and, therefore, the deflection of the membrane. A measurement of the capacitance of the membrane can therefore be used to calculate its deflection, which makes capacitance detection an interesting alternative method for electrical readout of nanomechanical graphene sensors. Dynamic (onresonance) capacitive readout has been demonstrated on suspended graphene bridges 10,11 . Measurements using static capacitive readout of the deflection of graphene membranes have been conducted on a voltage tunable capacitor array comprised of thousands of graphene membranes in parallel 12 .Here we extend on this work by capacitive detection of the deflection of a single graphene drum and demon-A 3D schematic of t...

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Section: Readout Using An Ad7746 Chip Interfaced With An Arduinomentioning

confidence: 99%

Static Capacitive Pressure Sensing Using a Single Graphene Drum

Davidovikj

Scheepers

Zant

et al. 2017

ACS Appl. Mater. Interfaces

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“…nobelprize.org/nobel_prizes/physics/laureates/2010/advancedphysicsprize2010.pdf), it is claimed that a hammock made of a squared meter of one-atom-thick graphene could sustain the weight of a 4 kg cat. More practically important are many applications of graphene-like scaffolds 3 and sensors, 4 which are crucially dependent on the mechanical strength. Meter-sized graphene is even being considered as a material for the lightsails in the starshot project to reach the star alpha centaury (https:// breakthroughinitiatives.org/Initiative/3).…”

Section: Introductionmentioning

confidence: 99%

Mechanics of thermally fluctuating membranes

2017

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Besides having unique electronic properties, graphene is claimed to be the strongest material in nature due to its Young modulus, which is, per atomic layer, much larger than that of steel. This reasoning however does not take into account the peculiar properties of graphene as a thermally fluctuating crystalline membrane, which at finite temperature, lead to a dramatic reduction of the Young modulus for micron-sized graphene samples in comparison with atomic scale values. We show that the standard Föppl-von Karman elasticity theory for thin plates, routinely used for the interpretation of experimental results has to be modified for graphene at room temperature and for micron-sized samples. Based on scaling analysis and atomistic simulation, we investigate the mechanics of graphene under transverse load up to breaking. We determine the limits of applicability of the Föppl-von Karman theory and provide quantitative estimates for the different regimes.

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“…Such applications include molecular sensors1, radiation sensors2, strain sensors3, temperature sensors4, various biosensors5, and pressure sensors678910111213. Graphene-based pressure sensors mostly consists of Piezoresistivity-type sensors that determine the strain produced in graphene by an external pressure and can thus precisely measure pressures much greater than atmospheric levels6789.…”

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confidence: 99%

“…Graphene-based pressure sensors mostly consists of Piezoresistivity-type sensors that determine the strain produced in graphene by an external pressure and can thus precisely measure pressures much greater than atmospheric levels6789. Only a few studies on sensors for measuring vacuum pressures have been reported10111213. For example, graphene on a silicon nitride membrane perforated by a periodic array of micro-through-holes exhibited pressure readings with high linearity10.…”

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confidence: 99%

“…A direct electrical readout of pressure via strain transduction was demonstrated using piezoresistive effects in a suspended graphene membrane11. In addition, a graphene squeeze-film sensor displayed pressure dependence of the resonant frequency produced by compression of the surrounding gas12. However, such sensors have rarely been used to measure vacuum pressures below 1 torr.…”

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Self-assembled and intercalated film of reduced graphene oxide for a novel vacuum pressure sensor

Ahn

Jung

Kim

et al. 2016

Sci Rep

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We report a new method for measuring vacuum pressures using Van der Waals (VDW) interactions between reduced graphene oxide (RGO) sheets. For this purpose, we utilized a reaction-based self-assembly process to fabricate various intercalated RGO (i-RGO) films, and monitored their electrical behavior with changing pressure and temperature. Pumping to remove gas from a vacuum chamber produced a decrease in the sheet resistance of i-RGO. With further pumping, distinctly different sheet resistance behaivors were observed depending on the measurement temperature. With increasing vacuum pressure, the resistance increased at 100 °C, whereas it decreased at 30 °C. Two types of VDW interactions are proposed to explain these features: a local VDW interaction between RGO sheets that resulted in V-shaped curves of sheet resistance with pressure changes and broad VDW interactions that occur between RGO sheets when the elastic force required to bend carbon clusters on an RGO sheet exceeds their vibrational energy at low temperatures. On the basis of the results, we propose that the resistance behavior of i-RGO as a function of vacuum pressure can be interpreted as the sum of the two different VDW interactions.

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Graphene Squeeze-Film Pressure Sensors

Cited by 169 publications

References 19 publications

Static Capacitive Pressure Sensing Using a Single Graphene Drum

Static Capacitive Pressure Sensing Using a Single Graphene Drum

Mechanics of thermally fluctuating membranes

Self-assembled and intercalated film of reduced graphene oxide for a novel vacuum pressure sensor

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