2101540 (2 of 10) www.advmattechnol.de 6. EMI SE performance of the thick samples, W 1 = 50 µm and W 1 = 70 µm, and plane sample: a) SE Total , b) SE R , c) SE A . d) SEM image of the sample W 1 = 50 µm (on the silicon mold). e) SEM image of the sample W 1 = 70 µm (on the silicon mold).