Grand challenges in low-temperature plasma physics

Charles, Christine

doi:10.3389/fphy.2014.00039

Cited by 12 publications

(6 citation statements)

References 37 publications

(43 reference statements)

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“…Recent advances in low‐temperature plasma science and technology can potentially contribute to the resolution of some of these glass‐industry‐related challenges through novel/optimized/advanced/enabling technologies, for example, high power impulse magnetron sputtering (HiPIMS), gas injection magnetron sputtering (GIMS), plasma‐enhanced atomic layer deposition (PEALD), cryogenic deep reactive‐ion etching (DRIE), laser‐induced plasma‐assisted ablation (LIPAA), plasma‐assisted milling, aerosol‐assisted deposition at atmospheric pressure, plasma printing, plasma‐enhanced chemical vapor deposition (PECVD), atmospheric‐pressure plasma liquid deposition (APPLD), atmospheric‐pressure thermal plasma chemical vapor deposition (TPCVD), plasma‐assisted vapor phase deposition (PAVPD), plasma‐assisted atomic layer deposition (PAALD), and plasma‐assisted pulsed laser/electron deposition (PAPLD/PAPED) …”

Section: The Unique Properties and Importance Of Glass And Opticsmentioning

confidence: 99%

White paper on the future of plasma science for optics and glass

Šimek

Černák

Kylián

et al. 2018

Plasma Processes & Polymers

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This paper reflects on the future of low-temperature plasma science in relation to the manufacturing and novel uses of glass. The text summarizes the current state of the art on the major topics discussed, such as glass processing, optics and photonics, healthcare issues, building and fenestration applications. It also identifies several challenges that are driven by applications, and which are compatible with roadmaps for their respective industries. The frontiers of plasma science are discussed, for example, in relation to the use of plasmas as an active optical element in fast-response adaptive optics systems, optical metamaterials, and the development of next-generation nanolithography. Future demand for the successful implementation of plasma-based technologies in the glass, optics, and photonic industries will depend on further progress in plasma science. Hence, some needs and recommendations concerning both fundamental and applied plasma research are summarized.

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Section: The Unique Properties and Importance Of Glass And Opticsmentioning

confidence: 99%

White paper on the future of plasma science for optics and glass

Šimek

Černák

Kylián

et al. 2018

Plasma Processes & Polymers

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“…Equations (1,2) show that two conditions need to be satisfied to ensure an accurate description of collisions between charged particles and neutrals. First, the differential cross-section assumed in the numerical model must be adequate to ensure a physical determination of post-collision velocities.…”

Section: Motivations For Modeling Neutral Particlesmentioning

confidence: 99%

“…Low-pressure gas discharges and plasma sources are used in a great variety of applications [1,2], such as space propulsion [3,4], neutral beam injection [5] and plasma separation [6][7][8]. To optimize these devices and expand the range of application of low-pressure plasmas, numerical modeling capabilities are highly desirable.…”

Section: Introductionmentioning

confidence: 99%

Pitfalls in Modeling Walls and Neutrals Physics in Gas Discharges Using Parallel Particle-in-Cell Monte Carlo Collision Algorithms

2018

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Owing to their ability to model the physics of low-pressure plasmas away from thermodynamical equilibrium, particle-in-cell (PIC) techniques have become one of the tools of choice to simulate the operation of many plasma devices. This trend is reinforced by the growing access to parallel computing resources which enables tackling problems that were previously intractable with PIC techniques. However, accurate modeling of these plasmas often depends critically on the detailed description of a variety of physical phenomena ranging from microscopic to macroscopic scale and from electrons' to neutral particles' timescale. Among those are coupling phenomena between charged particles and neutrals. We illustrate here how the implementation of simplified models for scattering kinematics, neutrals dynamics and particle-wall interaction can affect simulation results. Until the full breadth of these effects can be captured in models, these results underline the importance of using extensive parametric scans to assess the importance of these effects.

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“…The used power source, the applied gas type, and the gas pressures define the final application and its outcome. Plasma processes are among the key technologies for future innovations in research and development, especially in the field of plasma-assisted deposition, cleaning, and etching [2].…”

Section: Introductionmentioning

confidence: 99%

Plasma state supervision utilizing millimeter wave radar systems

Schenkel

Baer²,

Rolfes³

et al. 2023

Int. J. Microw. Wireless Technol.

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This work introduces a method for plasma state supervision, based on a frequency-modulated continuous wave radar sensor and a suitable signal evaluation enabling a continuous supervision method for the plasma state. Highly precise phase evaluation of the signal allows us to detect and visualize smallest changes in the plasma state. Assuming the plasma to act like a frequency-dependent dielectric material, the propagation of the electromagnetic wave depends on the plasma state and hence, also the measured phase. Broadband measurements are carried out at center frequencies of 80 and 140 GHz in a low-pressure plasma. The radar-based setup can be used for a very flexible application, capable for spatially resolved measurements in the plasma bulk. At the same time, the high measurement rate allows for quasi real-time monitoring, so that transient processes in the plasma are recorded. Due to the simple setup, this approach is most suitable for industrial applications to improve process control. The chosen different frequencies will show a change in the influence of the plasma on the electromagnetic wave demonstrating the advantages of multi-frequency approaches in future applications.

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Grand challenges in low-temperature plasma physics

Cited by 12 publications

References 37 publications

White paper on the future of plasma science for optics and glass

White paper on the future of plasma science for optics and glass

Pitfalls in Modeling Walls and Neutrals Physics in Gas Discharges Using Parallel Particle-in-Cell Monte Carlo Collision Algorithms

Plasma state supervision utilizing millimeter wave radar systems

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