2011
DOI: 10.1134/s1063780x11050072
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Glow discharge with electrostatic confinement of electrons in a chamber bombarded by fast electrons

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Cited by 67 publications
(56 citation statements)
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“…Modes of deposition of these coatings are given in Table 1. Each of these coatings has specific features that can significantly improve the performance of ceramics in various operation conditions [10][11][12][13][14][15].…”
Section: Resultsmentioning
confidence: 99%
“…Modes of deposition of these coatings are given in Table 1. Each of these coatings has specific features that can significantly improve the performance of ceramics in various operation conditions [10][11][12][13][14][15].…”
Section: Resultsmentioning
confidence: 99%
“…For this reason energy of accelerated ions corresponds to measured with kilovoltmeter (11) voltage between anode (3) and chamber (1). At the gas pressure p = 0.2 -1 Pa and distance 0.1 m from grid (4) most of accelerated ions (9) turn into fast neutral molecules (12) due to charge exchange collisions [17] with gas molecules (13). Current of slow ions (14) in the circuit of chamber (1) through feedback resistor (15) with 3-kΩ resistance induces negative bias voltage 100-200 V of the grid thus preventing penetration of electrons from plasma (6) through grid (4) into positive space charge sheath (16) between grid (4) and plasma emitter (10).…”
Section: Methodsmentioning
confidence: 99%
“…Drawbacks of the arc method are soft metal droplets in the hard coatings, non-practical consumption of the target material and nonuniformity of the discharge plasma. To eliminate the droplets and the plasma nonuniformity it was proposed in References [12,13] to produce the nitrogen plasma in hollow cathode glow discharge [14,15] using the working vacuum chamber as the hollow cathode.…”
Section: Introductionmentioning
confidence: 99%
“…, the discharge operating voltage does not depend on the effective length of the cathode cavity; the glow discharge condition is defined by the relation ( γ + δ )u = 1, and at S a << S c it coincides with the relation derived from energy balance and at δ = 0 with the relation obtained elsewhere [10,11,17].…”
Section: Modeling Of Gas Discharge In the Hollow Cathodementioning
confidence: 59%