Glow-discharge ion source for MEMS mass spectrometer

Grzebyk, Tomasz; Szmajda, Tomasz; Szyszka, Piotr; Górecka-Drzazga, Anna; Dziuban, Jan

doi:10.1016/j.vacuum.2019.109008

Cited by 11 publications

(3 citation statements)

References 17 publications

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“…It was found through experiments that higher quality factors correspond to higher frequency stability. For the electromagnetic excitation device A, the frequency fluctuation was about 1.5 kHz, which is close to the measured value of many nano-beam resonators under ultra-low temperature environment [45][46][47].…”

Section: Samplesupporting

confidence: 82%

Resonance characteristics and energy losses of an ultra-high frequency ZnO nanowire resonator

Cai¹,

Xu²

2022

Phys. Scr.

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An ultra-high frequency (UHF, 300 MHz ~ 3 GHz) nano mechanical resonator based on defect-free zinc oxide nanowire (ZnO NW) was fabricated through a top-down processing method. Using UHF detection technology based on a lock-in amplifier, through optimized measurement of high-performance equipment, it was detected at room temperature that the ZnO NW resonator could operate at a resonance frequency of nearly 650 MHz and a quality factor Q≈1000~2500, and its force sensitivity could reach 1 f N·Hz-1/2. The deformation, driving force and first-order resonance frequency of the resonator were calculated using the continuum model and compared with the experimental data. The resonance characteristics of ZnO NW resonators under piezoelectric excitation were analyzed and compared with that under electromagnetic excitation. The effects of various loss factors on the resonance characteristics were analyzed, with emphasis on the generation mechanism of piezoelectric loss, clamping loss and eddy current loss and their effects on quality factor and force sensitivity. The ZnO NWs used in this paper have piezoelectric effect, which is rare in other NWs, and are difficult to be fabricated in a bottom-up manner. And experiments show that for ZnO NWs resonators, piezoelectric excitation has obvious advantages in Q value compared with electromagnetic excitation. Unlike the bottom-up wet etch processing method, the resonant beam structure is well protected by the top-down processing method to reduce internal defects, and the top-down fabrication method is easier to integrate into the fabrication process of integrated circuits, which provides great potential for the applications of NW resonators, such as quantum electromechanical systems and high-frequency signal processing.

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Section: Samplesupporting

confidence: 82%

Resonance characteristics and energy losses of an ultra-high frequency ZnO nanowire resonator

Cai¹,

Xu²

2022

Phys. Scr.

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“…A driving force of 33 × 10 −12 N can generate a resonant beam amplitude of 0.8 nm and an output current signal of 0.1416 A, with force sensitivity reaching 1.23 × 10 −15 N•Hz −1/2 . However, due to the considerable surface area of nano-beams, they are susceptible to external environmental factors and typically require ultra-low temperature conditions for optimal performance [38,39]. Therefore, in demanding work environments where high reliability and a larger surface area of the resonant beam are required, such as in the application of resonators for the detection of biological particle reactions, the utility of micro-beam resonators is unparalleled.…”

Section: Resonance Characteristics and Quality Factormentioning

confidence: 99%

“…Resonators, particularly nano-resonators, possess a large surface-to-volume ratio, making them susceptible to environmental influences. Generally, nano-resonators must operate under ultra-low temperature and ultra-high vacuum conditions [ 38 , 39 ]. However, most studies are centered on biochemical reactions under atmospheric conditions, limiting the applicability of nano-resonators in biological reactions.…”

Section: Introductionmentioning

confidence: 99%

Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine

Cai,

Wang,

Cao

et al. 2024

Sensors

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Piezoelectric material-based devices have garnered considerable attention from scientists and engineers due to their unique physical characteristics, resulting in numerous intriguing and practical applications. Among these, flexural-mode piezoelectric resonators (FMPRs) are progressively gaining prominence due to their compact, precise, and efficient performance in diverse applications. FMPRs, resonators that utilize one- or two-dimensional piezoelectric materials as their resonant structure, vibrate in a flexural mode. The resonant properties of the resonator directly influence its performance, making in-depth research into the resonant characteristics of FMPRs practically significant for optimizing their design and enhancing their performance. With the swift advancement of micro-nano electronic technology, the application range of FMPRs continues to broaden. These resonators, representing a domain of piezoelectric material application in micro-nanoelectromechanical systems, have found extensive use in the field of physical sensing and are starting to be used in micropower systems and biomedicine. This paper reviews the structure, working principle, resonance characteristics, applications, and future prospects of FMPRs.

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Recent advances in MEMS mass spectrometers

Cheng

Liu

et al. 2022

Chinese Journal of Analytical Chemistry

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Glow-discharge ion source for MEMS mass spectrometer

Cited by 11 publications

References 17 publications

Resonance characteristics and energy losses of an ultra-high frequency ZnO nanowire resonator

Resonance characteristics and energy losses of an ultra-high frequency ZnO nanowire resonator

Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine

Recent advances in MEMS mass spectrometers

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