Global heat loss and thermal stress analysis in Czochralski crystal growth

Abstract

Based on our invention of an energy-efficient Czochalski crystal growth furnace, a 2D-axisymmetric numerical simulation model of LiNbO 3 crystal growth is developed. The heat transfer, melt and gas flow, radiation and the interface deflection have been examined. Heat losses in the furnace and the insulator, as well as the heating power and thermal stress distribution at three stages of crystal growth are calculated in detail. It is found that a large proportion of heat dissipates through the water-cooling system, and at the steel shell of the furnace, gas convection heat transfer is the major cooling mechanism. Less heat dissipation by radiation and more heat flux by gas convection to the crystal sidewall results in a larger concentrated thermal stress, which may induce large crystal cracks in the growth process. The simulation results of heating power are in coincidence with the actual power of our furnace, which verifies the feasibility of our model. The detailed information with respect to the device obtained from simulation can help to optimize the energy-saving design and growth process.

A method to model the transient performance of high frequency vibration in crystal growth

“…Figure 1(d) shows the temperature distributions from the 2D simulation at the surface, the side and the bottom of the model geometry. These results are in excellent agreement with the experimental results [22].…”