Glass–polymer superlattice for integrated optics

Abstract

Abstract. Glass and polymer interstacked superlattice like nanolayers were fabricated by nanosecond-pulsed laser deposition with a 193-nm-ultraviolet laser. The individual layer thickness of this highly transparent thin film could be scaled down to 2 nm, proving a near atomic scale deposition of complex multilayered optical and electronic materials. The layers were selectively doped with Er 3þ and Eu 3þ ions, making it optically active and targeted for integrated sensor application.

Photonic waveguide engineering using pulsed lasers — A novel approach for non-clean room fabrication!

“…In the context of thin film fabrication, both the standard excimer at 193nm and 800nm Ti-sapphire lasers, pulsed in nano and femto second regimes, respectively were used [3][4][5]. The pulse width and repetition rates of excimer and Ti-sapphire lasers were in sub s and 1-20Hz and 100fs and 250-1KHz, respectively.…”

“…In this glass, the total rare-earth ion concentration can be several weight percent which for the pulsed laser deposition conditions were optimized at 1.1mol% Er 2 O 3 , 1.5mol% Yb 2 O 3 , and 0.9 mol% CeO 2 . The details of thin film deposition and characterization using excimer laser is described elsewhere [5,6]. For PDMS materials preparation and thin film deposition on silica substrate was attempted by controlling the cracks due to thermal mismatch [4], and then optimized by forming nanometer scale amorphous superlattice structures of PDMS with Er 3+ -ion doped phosphate modified tellurite glass [7].…”