Integrated Optics: Devices, Materials, and Technologies XXIII 2019
DOI: 10.1117/12.2507530
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Glass integrated optic waveguides combining optical grade dicing and ion-exchanged planar waveguide

Abstract: Due to small refractive change, it is difficult to obtain high confined glass integrated waveguide. A proposed solution is to make firstly a planar waveguide by ion exchanged and then to use an optical grade dicing to realize two separated grooves. The cutting and the polishing of the glass are made at the same time. Monomode ridge waveguide with a smallest width of 4 µm and a height of tens micrometers are characterized, either in the near-infrared domain or in the visible domain. The propagation losses can b… Show more

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“…Such assessments required a rigorous polishing of the output waveguide facet in order to optimize light extraction. To this end, the waveguide facet and supporting glass substrate section were firstly cut to a 200 µm depth using a high-precision saw from DISCO HI-TEC EUROPE (RBT6219/granulometry of 4000, Kirchheim, Germany) that allowed simultaneous cutting and fine polishing [ 34 ]. The 1 mm thick substrate was then cut more roughly to an additional depth of several hundred micrometers and finally cleaved.…”
Section: Methodsmentioning
confidence: 99%
“…Such assessments required a rigorous polishing of the output waveguide facet in order to optimize light extraction. To this end, the waveguide facet and supporting glass substrate section were firstly cut to a 200 µm depth using a high-precision saw from DISCO HI-TEC EUROPE (RBT6219/granulometry of 4000, Kirchheim, Germany) that allowed simultaneous cutting and fine polishing [ 34 ]. The 1 mm thick substrate was then cut more roughly to an additional depth of several hundred micrometers and finally cleaved.…”
Section: Methodsmentioning
confidence: 99%