2022
DOI: 10.1364/oe.451026
|View full text |Cite
|
Sign up to set email alerts
|

Glass-in-glass infiltration for 3D micro-optical composite components

Abstract: Chalcogenide glass exhibits a wide transmission window in the infrared range, a high refractive index, and nonlinear optical properties; however, due to its poor mechanical properties and low chemical and environmental stability, producing three-dimensional microstructures of chalcogenide glass remains a challenge. Here, we combine the fabrication of arbitrarily shaped three-dimensional cavities within fused silica molds by means of femtosecond laser-assisted chemical etching with the pressure-assisted infiltr… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
2
1
1

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(2 citation statements)
references
References 51 publications
0
2
0
Order By: Relevance
“…The fabrication technology employed for the realization of the sensor is a combination of femtosecond laser direct writing (FLDW) [20][21][22][23][24][25][26][27][28] and femtosecond laser irradiation followed by chemical etching (FLICE). [29][30][31][32][33][34][35] Mostly these technologies have been demonstrated separately, though a few papers combine them 36,37 Firstly, all structures (waveguides, Bragg gratings, contours of V-grooves and cantilever) are formed in a single laser exposure step. Next, the whole fused silica substrate is submerged in a KOH-solution for etching.…”
Section: Fabricationmentioning
confidence: 99%
“…The fabrication technology employed for the realization of the sensor is a combination of femtosecond laser direct writing (FLDW) [20][21][22][23][24][25][26][27][28] and femtosecond laser irradiation followed by chemical etching (FLICE). [29][30][31][32][33][34][35] Mostly these technologies have been demonstrated separately, though a few papers combine them 36,37 Firstly, all structures (waveguides, Bragg gratings, contours of V-grooves and cantilever) are formed in a single laser exposure step. Next, the whole fused silica substrate is submerged in a KOH-solution for etching.…”
Section: Fabricationmentioning
confidence: 99%
“…Direct laser writing (DLW) is versatile in structural modifications and property regulation. 1,2,3,4 It has found widespread applications in customizing three-dimensional (3D) patterns on polymers, fused silica, sapphire, and glasses. These patterns can be ranges of functional materials, such as perovskites, carbon dots, and noble metal particles.…”
Section: Introductionmentioning
confidence: 99%