2021
DOI: 10.1117/1.jatis.7.2.020902
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Glass ceramic ZERODUR®: Even closer to zero thermal expansion: a review, part 2

Abstract: Observational astronomy has sought better telescopes with higher resolution from its beginning. This needs ever-larger mirrors with stable, high-precision surfaces. The extremely low-expansion glass ceramic ZERODUR ® has enabled such mirrors for more than 50 years with significant improvements in size and quality since then. We provide a survey of the progress achieved in the last 15 years. Equally important as the thermal expansion coefficient CTE is its homogeneity. The CTE variation in 4-m mirror blanks lie… Show more

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Cited by 13 publications
(11 citation statements)
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References 39 publications
(58 reference statements)
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“…Macroscopically the interplay between these two coexisting phases results in material having a net macroscopic CTE close to 0 ppm.K1 over temperature range that may be centered on T=20°C and spanning tens of degrees 1 . This supports form stability under thermal perturbations, but furthermore provides the critical features of high homogeneity, high isotropy and availability in large monolithic lightweigthed forms made of ZERODUR ® the material of choice for sensitive telescope mirrors, typically in orbiting missions 5 , 6 . For these reasons ZERODUR ® continues to be a widely employed material in space where high stability is needed.…”
Section: Introductionmentioning
confidence: 93%
See 1 more Smart Citation
“…Macroscopically the interplay between these two coexisting phases results in material having a net macroscopic CTE close to 0 ppm.K1 over temperature range that may be centered on T=20°C and spanning tens of degrees 1 . This supports form stability under thermal perturbations, but furthermore provides the critical features of high homogeneity, high isotropy and availability in large monolithic lightweigthed forms made of ZERODUR ® the material of choice for sensitive telescope mirrors, typically in orbiting missions 5 , 6 . For these reasons ZERODUR ® continues to be a widely employed material in space where high stability is needed.…”
Section: Introductionmentioning
confidence: 93%
“…1 This supports form stability under thermal perturbations, but furthermore provides the critical features of high homogeneity, high isotropy and availability in large monolithic lightweigthed forms made of ZERODUR ® the material of choice for sensitive telescope mirrors, typically in orbiting missions. 5,6 For these reasons ZERODUR ® continues to be a widely employed material in space where high stability is needed. It is a critical part of more than 40 orbiting missions 2,3 among these two NASA great observatories, Hubble-M2 and all Wolter mirrors on Chandra.…”
Section: Introductionmentioning
confidence: 99%
“…Different kinds of deep etched cantilevers before and after the releasing step are shown in Figure 3. Here, scanning electron Temperature dependence of the coefficient of thermal expansion (CTE) of different materials for micromechanical systems (left; fused silica, [36] Zerodur, [6] ULE glass, [20] and undoped Si [37,38] ). Temperature dependence of Young's modulus of different materials for micromechanical systems (right; fused silica, [39] Zerodur, [40] ULE glass, [41] and Si <100> to <111> [42] ).…”
Section: Deep Etching and Releasing Of Micromechanical Structures In ...mentioning
confidence: 99%
“…Notably, most applications of ultralow expansion (ULE) materials are so far still linked to macroscopic systems such as mirror substrates for astronomical applications, components of nanopositioning and nanomeasuring tools or as glass scales. [4][5][6] ULE materials, such as ULE glasses from Corning as well as the glass-ceramic Zerodur from Schott are hitherto rarely used for microscale applications, which originates mainly from a lack of capable manufacturing techniques that provide a superior patterning accuracy and reproducibility at the microscale. With our preliminary work on the reactive ion etching (RIE) of complex glasses and glass-ceramics, we established a technology for the fabrication of deep etched microstructures in glass with lithographic precision up to released micromechanical elements in the glass-ceramic Zerodur, with some restrictions in structure geometry and quality.…”
Section: Introductionmentioning
confidence: 99%
“…This combination rapidly led to the development of zero-thermal-expansion glass-ceramic materials, which are still today essential for applications spanning from transparent fire-viewing windows to telescope mirror substrates [11,12]. Between 0 °C and 50 °C, commercially available materials based on Qss such as Zerodur ® can achieve a coefficient of thermal expansion (CTE) as low as (0 ± 0.007) x 10 -6 K -1 , with spatial variations that are less than 0.005 x 10 -6 K -1 over the whole volume of a telescope mirror blank with a diameter of 4 meters [13,14]. Indeed, the thermal expansion of Qss can be finely tuned, taking advantage of their variable Al/Si ratio and of the full solid solution [8,9,15,16] existing between: (i) Mgbearing Qss, exhibiting trigonal symmetry and positive thermal expansion [17][18][19][20][21]; (ii) Li-and Znbearing Qss, which were reported to be fully hexagonal (at a sufficiently high level of chemical stuffing) and to contract upon heating [8,12,[22][23][24][25][26][27].…”
mentioning
confidence: 99%