Glass Blowing on a Wafer Level

Eklund, E.J.; Shkel, Andrei M.

doi:10.1109/jmems.2007.892887

Cited by 103 publications

(59 citation statements)

References 11 publications

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“…Bubbles along microcapillaries 7,8,16,17 and on-chip 18 devices can possess excellent optical transmission 7,8,16,17 together with low mechanical dissipation while allowing liquid to be placed inside the device. Additionally, such glass bubbles can benefit from optically excited vibrations as no electrodes are needed.…”

Section: Introductionmentioning

confidence: 99%

Cavity optomechanics on a microfluidic resonator with water and viscous liquids

et al. 2013

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Currently, optical or mechanical resonances are commonly used in microfluidic research. However, optomechanical oscillations by light pressure were not shown with liquids. This is because replacing the surrounding air with water inherently increases the acoustical impedance and hence, the associated acoustical radiation losses. Here, we bridge between microfluidics and optomechanics by fabricating a hollow-bubble resonator with liquid inside and optically exciting vibrations with 100 MHz rates using only mW optical-input power. This constitutes the first time that any microfluidic system is optomechanically actuated. We further prove the feasibility of microfluidic optomechanics on liquids by demonstrating vibrations on organic fluids with viscous dissipation higher than blood viscosity while measuring density changes in the liquid via the vibration frequency shift. Our device will enable using cavity optomechanics for studying non-solid phases of matter, while light is easily coupled from the outer dry side of the capillary and fluid is provided using a standard syringe pump. Keywords: nonlinear optics; optical materials and devices; optomechanics INTRODUCTION A major application of optical resonators is in the field of sensing where microresonators were used to sense biomarkers in serum 1 and to detect viruses and nanoparticles 2-4 in an aqueous environment. With similar motivation and in a parallel effort, mechanical resonators were used to weigh biomolecules and cells. 5,6 Just like we use more than one sense (e.g., eyes and ears) to detect hazards, optomechanics might suggest a bridge between the seemingly parallel optical and mechanical detection fields. The recent availability of liquid containing bubble shaped resonators, 7,8 in combination with optomechanical vibrations at .GHz rate, 9-12 might pave the way for ultrasound investigations on analytes in liquids. Nevertheless, cavity optomechanics on non-solid phases of material was never before demonstrated.One of the major 'show stoppers' on the way to microfluidic optomechanics originates from the fact that water has acoustical impedance that is more than 4000 times larger than air. Hence, naively immersing optomechanical devices in water will accordingly increase the acoustical radiation losses. Liquid submerged optomechanical oscillators are therefore challenging, as sound will tend to escape from the cavity by radiating out rather than being confined to the resonator. Here, we confine the high-impedance water inside 6,13 a silica-bubble resonator so that its acoustical quality factor is minimally affected. In this manner, when both mechanical and optical quality factors, Q m and Q O , of microdevices are sufficiently leveraged, their optical and mechanical modes can be parametrically coupled, allowing the optical excitation of vibrations. 14 In spherical shapes 9 such as our bubble,

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Section: Introductionmentioning

confidence: 99%

Cavity optomechanics on a microfluidic resonator with water and viscous liquids

et al. 2013

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“…This enables larger near spherical microbubbles where the equatorial plane is located above the silicon substrate plane (critical for WGM light confinement with minimal coupling loss to the substrate) without using a complex silicon wafer bonding process, to increase the gas cavity volume, as was demonstrated by others 15 . Finally, Devcon 5 minute epoxy is used to carefully attach a N48 grade 1.5 mm diameter and 1.5 mm long neodymium magnet to the top of the microbubble, perpendicular to the sample plane, as seen in Fig.…”

Section: Fabrication and Testingmentioning

confidence: 94%

“…The chip-scale glassblowing process was first pioneered by Eklund and Shkel 15 for mechanical resonance applications. The process was modified and adapted for optical resonance as published in our earlier work, 14 which provides more detail on the fabrication process and WGM resonance achievable using these chip-scale microbubbles.…”

Section: Fabrication and Testingmentioning

confidence: 99%

Chip-scale high Q-factor glassblown microspherical shells for magnetic sensing

et al. 2018

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A whispering gallery mode resonator based magnetometer using chip-scale glass microspherical shells is described. A neodynium micro-magnet is elastically coupled and integrated on top of the microspherical shell structure that enables transduction of the magnetic force experienced by the magnet in external magnetic fields into an optical resonance frequency shift. High quality factor optical microspherical shell resonators with ultra-smooth surfaces have been successfully fabricated and integrated with magnets to achieve Q-factors of greater than 1.1 × 107 and have shown a resonance shift of 1.43 GHz/mT (or 4.0 pm/mT) at 760 nm wavelength. The main mode of action is mechanical deformation of the microbubble with a minor contribution from the photoelastic effect. An experimental limit of detection of 60 nT Hz−1/2 at 100 Hz is demonstrated. A theoretical thermorefractive limited detection limit of 52 pT Hz−1/2 at 100 Hz is calculated from the experimentally derived sensitivity. The paper describes the mode of action, sensitivity and limit of detection is evaluated for the chip-scale whispering gallery mode magnetometer.

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“…Several techniques of glass micromachining currently exist, including drilling [13], milling [13], laser [13], sandblasting [13], wet etching [14,15], dry etching [16,17,18], glass molding techniques [6,19,20,21,22], etc . The first three methods are usually used for quite large pattern sizes and face problems with small structures.…”

Section: Introductionmentioning

confidence: 99%

“…In essence, the glass blowing can be thought of as the reverse of the glass reflow. Glass blowing has been described in previous publications [19]. First, an etched cavities in silicon is bonded with thin glass wafer.…”

Section: Introductionmentioning

confidence: 99%

An Investigation of Processes for Glass Micromachining

2016

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This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Sandblast and wet etching techniques are simple processes but face difficulties in small and high-aspect-ratio structures. A sandblasted 2 cm × 2 cm Tempax glass wafer with an etching depth of approximately 150 µm is demonstrated. The Tempax glass structure with an etching depth and sides of approximately 20 μm was observed via the wet etching process. The most important aspect of this work was to develop RIE and glass reflow techniques. The current challenges of these methods are addressed here. Deep Tempax glass pillars having a smooth surface, vertical shapes, and a high aspect ratio of 10 with 1-μm-diameter glass pillars, a 2-μm pitch, and a 10-μm etched depth were achieved via the RIE technique. Through-silicon wafer interconnects, embedded inside the Tempax glass, are successfully demonstrated via the glass reflow technique. Glass reflow into large cavities (larger than 100 μm), a micro-trench (0.8-μm wide trench), and a micro-capillary (1-μm diameter) are investigated. An additional optimization of process flow was performed for glass penetration into micro-scale patterns.

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Glass Blowing on a Wafer Level

Cited by 103 publications

References 11 publications

Cavity optomechanics on a microfluidic resonator with water and viscous liquids

Cavity optomechanics on a microfluidic resonator with water and viscous liquids

Chip-scale high Q-factor glassblown microspherical shells for magnetic sensing

An Investigation of Processes for Glass Micromachining

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