To realize the hole-mediated ferromagnetism, manganese and nitrogen-codoped ZnO ͑Zn 1−x Mn x O:N͒ films were prepared on sapphire ͑0001͒ by reactive radio-frequency ͑rf͒ magnetron sputtering from Zn 0.97 Mn 0.03 O ceramic targets using N 2 gas. X-ray photon spectra reveal that the doped Mn ions are mainly in divalent states and the coexistence of O -Zn and N -Zn bonds in the films. According to the absorption spectra, the band gap of Zn 0.97 Mn 0.03 O : N films is about 3.15 eV, which is slightly lower than that of ZnO films ͑3.20 eV͒. Compared with Zn 0.97 Mn 0.03 O films, ferromagnetic behavior of Zn 0.97 Mn 0.03 O : N films were significantly changed with a coercivity of about 70 Oe, a saturation magnetization of 0.92 B /Mn 2+ and a remanance over 0.15 B /Mn 2+ at 300 K, while at 10 K, they increased to be about 110 Oe, 1.05 B /Mn 2+ and 0.23 B /Mn 2+ , respectively. However, rapid thermal annealing treatment in pure oxygen results in a significant decrease on the magnetic properties of the films.