Giant Ferroelectric and Piezoelectric Properties of Lead Free Ba_0.85Ca_0.15Ti_0.90Zr_0.10O₃ Thin Film in 100 nm Thickness Range

Abstract

Lead free Ba0.85Ca0.15Ti0.90Zr0.10O3/SrRuO3(BCZT/SRO) heterostructured thin film grown on (001)‐SrTiO3 substrate were prepared by PLD. The microstructure, ferroelectric and piezoelectric of the thin film were investigated in detail. Giant ferroelectric properties of the BCZT thin films with thickness ∽100 nm and remanent polarization P r of 57.1 μC/cm2 is obtained, which is attributed to the (00l)‐oriented epitaxial structure and lower substrate clamping. Besides, the BCZT/SRO heterostructure exhibits excellent piezoelectric properties with the d33 values of different grain size (40 ‐140 nm) varied from 75 to 130 pm/V, providing a potential candidate used as piezoelectric material for magnetoelectric composite films. The BCZT/SRO heterostructured thin film with excellent ferroelectric and piezoelectric properties may be a good alternative to PZT thin films for piezoelectric device applications.This article is protected by copyright. All rights reserved.