Germanium‐antimony‐selenium‐tellurium thin films: Clusters formation by laser ablation and comparison with clusters from mixtures of elements
Fei Huang,
Tomáš Halenkovič,
Marion Baillieul
et al.
Abstract:Quaternary germanium-antimony-selenium-tellurium (Ge-Sb-Se-Te) thin films deposited from Ge 19.4 Sb 16.7 Se 63.9−x Te x (x = 5, 10, 15, and 20) glass-ceramics targets by radio frequency magnetron sputtering were studied using laser ablation quadrupole ion trap time of flight mass spectrometry. Binary, ternary, and quaternary Ge a Sb b Se c Te d clusters were formed and their stoichiometry was determined. By comparison of the clusters obtained from quaternary Ge-Sb-Se-Te thin films and those from ternary Ge-Sb-… Show more
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